Layout characteristic parameter extraction method for graphic data of grid point edge region

A technology of edge area and graphic data, which is applied in the field of layout feature parameter extraction including grid edge area graphic data, can solve the problems of geometric feature parameter extraction errors and other problems, achieve simple extraction steps, improve accuracy, and facilitate batching The effect of the operation

Active Publication Date: 2016-10-12
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology

In such a situation, the geometric figure 203 is cut into two small line width figures, which will obviously have a huge erroneous impact on the subsequent extraction of geometric feature parameters

Method used

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  • Layout characteristic parameter extraction method for graphic data of grid point edge region
  • Layout characteristic parameter extraction method for graphic data of grid point edge region
  • Layout characteristic parameter extraction method for graphic data of grid point edge region

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Embodiment Construction

[0031] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0032] image 3 A flowchart schematically shows a method for extracting layout feature parameters including graphic data of grid edge regions according to a preferred embodiment of the present invention.

[0033] like image 3 As shown, according to the preferred embodiment of the present invention, the method for extracting the layout feature parameters including the graphic data of the grid edge area includes:

[0034] The first step S1: firstly divide the original design layout data into grid points, and the division of grid points includes at least four times, such as Figure 4 Shown:

[0035] The grid point of the first batch of grid point division 401 is based on the coordinate (0, 0) as the starting point, the grid point size is w*w, a...

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Abstract

The invention provides a layout characteristic parameter extraction method for graphic data of a grid point edge region. The method comprises the steps of performing grid point division on original design layout data for at least four times, and during the grid point division, expanding all edges of a grid point from inside to outside of a graph to form an annular region; distinguishing a graph in the grid point from an edge graph of the grid point; calculating the weight line width, perimeter and density of the graph in the grid point to obtain calculation results and influence factor localization; calculating the weight line width, perimeter and density of the graph in the grid point edge region to obtain calculation results and influence factor localization; and calculating geometric characteristic parameter values of all grid points.

Description

technical field [0001] The present invention relates to the field of semiconductor design and manufacture, in particular to the field of DFM (Design ForManufacture) manufacturability graphic design; more specifically, the present invention relates to a method for extracting layout characteristic parameters including graphic data of grid edge regions. Background technique [0002] CMP-Chemical Mechanical Polishing process hotspot analysis is an important part of DFM-Design for Manufacturability (DFM-Design for Manufacturability) technology, and its importance to yield improvement has been fully recognized by the industry. The CMP process is mainly used to maintain the thickness of the metal layer and the flatness of the wafer to accommodate the ever-shrinking photolithography process window. As the size of the chip continues to shrink, the complexity of the pattern continues to increase, especially after the use of low dielectric constant (Low-k) materials to replace the sili...

Claims

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Application Information

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IPC IPC(8): G06F17/50
CPCG06F30/392
Inventor 朱忠华阚欢魏芳朱骏吕煜坤张旭升
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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