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Method for controlling air gap thickness in Otto structure by using dielectric film

A dielectric film, air gap technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve problems such as difficult control, influence, and insufficient accuracy of mechanical control methods

Active Publication Date: 2016-11-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0006] The present invention aims to overcome the shortcomings of the above-mentioned prior art, and proposes a method for controlling the thickness of the air gap by using a nanoscale dielectric film, which can not only solve the problems of insufficient precision and difficult control in the mechanical control method, but also overcome the curvature control There are contact points in the method that affect the final measurement results

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  • Method for controlling air gap thickness in Otto structure by using dielectric film
  • Method for controlling air gap thickness in Otto structure by using dielectric film
  • Method for controlling air gap thickness in Otto structure by using dielectric film

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Embodiment Construction

[0035] In order to clarify the technical solutions and advantages of the present invention, the present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited by this.

[0036] Please refer to figure 1 , figure 1 It is a schematic diagram of the Otto structure formed after implementing the invention on the bottom surface of the prism. The structure is composed of four parts: an isosceles rectangular prism 1, a fixed air gap thickness 2, a rectangular parallelepiped dielectric film 3, and a metal film 4 to be tested.

[0037] Please refer to figure 2 , figure 2 It is a schematic diagram of the Otto structure formed after implementing the invention at both ends of the cylindrical mirror surface, wherein (a) is a front view of the structure, and (b) is a side view of the structure, and the structure is composed of five parts: prism 1, Cylindrical mirror 5...

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Abstract

The invention discloses a method for controlling the air gap thickness in an Otto structure by using a dielectric film. When the light intensity reflectivity R has a minimum value, the corresponding air gap thickness d1 is the thickness of the dielectric film for plating. The dielectric film is used for plating a prism bottom by using a physical deposition method or a chemical deposition method. After the dielectric film is used for plating, the thickness of the dielectric film for plating is measured by a precision measuring instrument, and namely the thickness of the dielectric film for plating is the thickness of an actually controlled nano scale air gap. The problem that it is difficult to precisely control the thickness of the nano scale air gap in the Otto structure which is used for generating surface plasma resonance effects is solved.

Description

technical field [0001] The invention relates to the field of thickness control, in particular, the precise control of the thickness of the nanoscale fixed air gap or gradient air gap is realized by using a dielectric thin film. Background technique [0002] Surface plasmon resonance (SPR) is a physical optical effect that was discovered as early as 1902. For a long time after its discovery, this effect did not attract much attention. Until 1971, Kretschmann laid the foundation for the structure of SPR sensor, so far SPR began to enter the application field. After years of development, SPR is currently playing a huge role in many important fields such as life sciences, medical testing, drug screening, food testing, environmental monitoring, drug testing, and forensic identification. [0003] The formation of SPR needs to meet three basic conditions: the existence of surface plasmons, the existence of a suitable excitation source, and certain resonance conditions must be sati...

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Application Information

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IPC IPC(8): G01B11/06B82Y35/00B82Y40/00
CPCB82Y35/00B82Y40/00G01B11/0625
Inventor 曾爱军谷利元胡国行黄惠杰贺洪波
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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