Apparatus and method for measuring gas mass-transfer diffusivity of film material

Abstract

An apparatus and a method for measuring gas mass-transfer diffusivity of film material relate to an apparatus and a method for measurement of a film material. The apparatus comprises two connected vacuum chambers, that is, a measurement chamber and a plenum chamber of which the background leak rate has been determined. The measurement chamber and the plenum chamber are connected through an air exhaust channel with a sealing flange, the sealing flange faces to the side of the plenum chamber, and flange covers and seal rings are utilized for sealing and fixing a disc-shaped blind flange or a test piece; the plenum chamber is provided with an openable plenum chamber door for facilitating mounting or dismounting of the blind flange or the test piece; and the plenum chamber is provided with a plenum-chamber pressure gage, a pneumatic pipeline with a pressure-adjusting control valve and a pumping pipeline with a plenum-chamber valve. The apparatus employs a porous ceramic support material and accelerates gas transportation rate by utilizing a vacuum pump for making a larger pressure difference, and for film materials with low permeability, the apparatus can rapidly obtain stable gas pressure and gas flux data and has accurate measurement result.

Description

technical field [0001] The invention relates to a thin film material measuring device and method, in particular to a thin film material gas mass transfer diffusion coefficient measuring device and method. Background technique [0002] At present, the gas chamber method and the mass method are mainly used to measure the gas mass transfer diffusion coefficient in solid materials. The gas chamber method is to place the measured material in the middle of two chambers or the outlet of a single chamber, and calculate the mass transfer characteristic parameters of the material by monitoring the concentration change of the target gas on both sides of the material or detecting the concentration of the target gas in the equilibrium state. If two static chambers are used, the calculation results are uncertain, so in order to ensure the accuracy of the measurement data, the dynamic chamber method is generally used. This method requires a large pressure difference on both sides of the t...

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Problems solved by technology

[0005] Low-strength film materials are not enough to withstand the large pressure difference on both sides, and the large pressure difference cannot be used to speed up the gas transmission rate; if the thickness is increased, the gas diffusion data cannot be quickly obtained for low-permeability film materials. If the measurement time is too long, the measurement data will be inaccurate

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