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X-ray generating apparatus

A technology for generating devices and X-rays, used in X-ray tubes, X-ray tubes, X-ray equipment, etc., can solve problems such as under-optimization, and achieve the effect of reducing friction

Inactive Publication Date: 2016-11-16
SHIMADZU SEISAKUSHO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Here, for example, when such an X-ray generating device is used in an X-ray inspection device, etc., if the spatial coordinates of the X-ray focus change, the see-through area will change even if a sample is placed at the same location. , various readjustments such as reconfiguration of various parameters of the device system or position adjustment of device components are required, which is not optimal

Method used

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Embodiment Construction

[0051] Below, while referring to the attached Figure 1 Embodiments of the present invention will be described.

[0052] figure 1 It is a longitudinal cross-sectional view schematically showing the vicinity of a target in an embodiment of the present invention, figure 2 yes figure 1 The A-A line profile in. in addition, figure 1 equivalent to figure 2 The a-b-c-d-e-f profile in . Moreover, the basic configuration of the X-ray generator in this embodiment is the same as that described above Figure 9 Likewise, a sealed vacuum vessel and a transmission target are used.

[0053] figure 1 The illustrated vacuum container includes a main body 1 in which an electron gun (not shown) is accommodated and fixed, and a moving part 3 airtightly connected to the main body 1 via a vacuum bellows 2 . That is, a through hole 1a is formed at the top of the main body 1, and one end of the vacuum bellows 2 is airtightly fixed around the through hole 1a by welding or welding. Simi...

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Abstract

The present invention relates to an X-ray generating apparatus. A moving part(3) for holding an X-ray irradiation window (5) of a target (4) is connected to the body portion (1) of a vacuum container via the vacuum bellows (2), and a guiding mechanism for limiting the moving direction and the inclination of the moving part (3) is arranged outside the vacuum container. The guiding mechanism includes a guide flat surface (10a) formed on a side of the main body (1) along a plane orthogonal to the central axis of the electron beam (B), a flat surface (13a) for guiding the movable flat surface 13a, (3) is formed so as to face the guide flat surface (10a); and a plurality of rotating bodies (12) which are rotatable therebetween. As a result, the frictional force in the guiding mechanism can be reduced.

Description

technical field [0001] The present invention relates to an X-ray generating device used in an industrial X-ray inspection device or a medical X-ray inspection device, or various X-ray analysis devices or measurement devices using X-ray diffraction or refraction, and particularly relates to An X-ray generator of a type that generates X-rays by causing electrons to collide with a target in a vacuum container. Background technique [0002] There are two types of X-ray generators that generate X-rays by colliding electrons against a target in a vacuum container: one that uses a reflective target that emits X-rays in a direction different from the direction in which the electrons travel, and one that uses a A transmissive target that emits X-rays in the same direction as electrons travel. [0003] Among them, the reflective target material is generally made of a bulk material, and is arranged inside the container with a certain distance from the X-ray irradiation window for emit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J35/10
CPCH01J35/101H01J35/186A61B6/40H01J5/02H01J5/04H01J5/48H01J19/54H01J19/64H01J35/20H01J35/28A61B6/44A61B2560/0406H01J35/16H01J37/16H01J2235/16H01J2235/163H05G1/02H05G1/04
Inventor 宫冈明宽
Owner SHIMADZU SEISAKUSHO LTD
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