An intelligent source baffle system and method for preparing hard coating thereof
A hard coating and baffle technology, applied in the coating, metal material coating process, vacuum evaporation coating, etc., can solve the problem of reducing the loading space of the coating machine and the loading capacity of the workpiece, the accelerated release of the adsorbed gas, and CAE Target surface pollution and other problems, to reduce the possibility of air leakage and stuck, improve the background vacuum degree, simple structure design effect
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[0051] Such as Figures 1 to 3 As shown, the smart source baffle system of the present invention includes a vacuum chamber 1 , a circular ring gear 2 , a smart source baffle 3 , a gear reduction motor 4 , a magnetic fluid sealed transmission shaft 5 and a target source 6 .
[0052] The vacuum chamber 1 is cylindrical as a whole, with a front door 11 on the front side, a main suction port 12 on the rear side, and a top plate 13 on the top; , B, C, D four sets of cathodic arc target sources (CAE) 6 of the same or different targets, and each set of target sources 6 consists of four separate target sources.
[0053] The circular ring gear 2 is hoisted inside the top end of the vacuum chamber 1 .
[0054] The smart source baffle 3 is hoisted below the circular ring gear 2 .
[0055] The gear reduction motor 4 is installed outside the top plate 13 of the vacuum chamber 1, and it is a gear reduction motor with a rotary encoder and a transmission gear is installed at the power outpu...
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