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A sample space scanning and positioning device

A space scanning and positioning device technology, applied in the field of measurement, can solve the problems of difficult movement, large cryogenic optical thermostat, etc., achieve high-precision three-dimensional space positioning, and realize the effect of microspectral measurement

Active Publication Date: 2019-03-22
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, semiconductor materials, especially low-dimensional semiconductor materials, have good spectral intensity and spectral properties at low temperature due to phonon scattering and other reasons, so the sample needs to be placed in a low-temperature optical thermostat. At this time, to realize the sample space Scanning would require moving along with the cryo-optical thermostat, which is often bulky and difficult to move
Especially for microspectral measurement, the size of the measurement object is usually less than 1 micron, such as a single semiconductor quantum dot or a single crystal defect. At this time, it is almost impossible to achieve precise positioning of the spatial position of the measurement object by moving the low-temperature optical thermostat.

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  • A sample space scanning and positioning device
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  • A sample space scanning and positioning device

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Embodiment Construction

[0017] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0018] In order to better describe the spatial relationship between the components of the present invention, the horizontal left-right direction is defined as the X-axis direction, the horizontal front-back direction is defined as the Y-axis direction, and the vertical up-down direction is defined as the Z-axis direction.

[0019] The embodiment of the present invention provides a sample space scanning and positioning device. As shown in FIG. , the first mirror 6, the second mirror 8 and the objective lens 12.

[0020] Wherein the first translation platform 1 can drive the second translation platform 3, the third translation platform 5, the first mirror 6, the second mirror 8 and the objective lens 12 to move synchronousl...

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Abstract

Provided is a sample space scanning and positioning device. The sample space scanning and positioning device comprises a base, a first displacement platform, a second displacement platform, a third displacement platform and a light path system, wherein the first displacement platform is fixedly connected to the base in a sliding mode and can move in the first direction relative to the base, the second displacement platform is fixedly connected to the first displacement platform in a sliding mode and can move in the second direction relative to the first displacement platform, the third displacement platform is fixedly connected to the second displacement platform in a sliding mode and can move in the third direction relative to the third displacement platform, and the light path system is used for excitation and collection of spectral measurement. By means of linkage design of the three displacement platforms, a sample spectrum collecting objective lens and a light path can achieve synchronous movement in three-dimensional space, and spectral measurement can be more convenient and efficient.

Description

technical field [0001] The invention belongs to the technical field of measurement, and in particular relates to a device for scanning and positioning a sample space during the sample spectral measurement process. Background technique [0002] Spectral measurement technology is widely used in physics, chemistry, biology and other related disciplines. People began to understand the microcosm from atomic spectroscopy, and discovered the general rules of quantization in the microcosm, and the importance of visible spectrum technology. Spectroscopic measurements are also an important tool for studying the properties of semiconductors. It can measure and analyze physical properties such as energy band structure, impurity defects, and carrier transport of semiconductors. [0003] In actual spectral measurement, commercial spectrometers usually use the method of moving the stage to move the sample to achieve spectral measurement of different samples or different positions of the ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/25G01N21/64G01N21/01
CPCG01N21/01G01N21/255G01N21/6458G01N2021/0112G01N2201/1035
Inventor 窦秀明丁琨孙宝权
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI