Three-terminal vertical constant-current device with protection function and manufacturing method of three-terminal vertical constant-current device

Abstract

The invention provides a three-terminal vertical constant-current device with a protection function and a manufacturing method of the three-terminal vertical constant-current device. The device comprises a vertical constant-current diode and a transient voltage suppresser diode, wherein the vertical constant-current diode comprises a metal anode, an N-type substrate, a first lightly doped N-type epitaxial layer, a first P-type region, a second heavily doped N-type epitaxial layer, a first N-type heavily doped region and a first metal cathode; and the transient voltage suppresser diode comprises another metal anode, another N-type substrate, another first lightly doped N-type epitaxial layer, another heavily doped N-type epitaxial layer, a second P-type region, an oxide layer and a second metal cathode. The transient voltage suppresser diode and the vertical constant-current diode are integrated together, so that the constant-current diode has surge handling capability; the reliability of the constant-current diode and a system is strengthened; and proper breakdown voltage, clamp voltage and peak pulse current of the transient voltage suppresser diode can be obtained through adjusting the junction depth and the concentration of the second P-type region.

Description

Technical field [0001] The invention belongs to the technical field of semiconductor power devices, and in particular relates to a vertical constant current device with a protective function at three ends and a manufacturing method thereof. Background technique [0002] Constant current source is a commonly used electronic equipment and device, which is widely used in electronic circuits. The constant current source is used to protect the entire circuit, even if the voltage is unstable or the load resistance changes greatly, it can ensure the stability of the power supply current. However, the current high breakdown voltage of constant current diodes is generally 30 ~ 100V, so there is a problem of low breakdown voltage, while the constant current that can be provided is also low, and most constant current diodes cannot cope with the harsh external environment , In the case of lightning strikes, large voltages or large currents generated by grid fluctuations, it is easy to burn ...

AI Technical Summary

Problems solved by technology

However, the current high breakdown voltage of constant current diodes is generally 30-100V, so there is a problem of low breakdown voltage, and the constant current that can be provided is also low, and most constant current diodes cannot cope with the harsh external environment. , in the case of lightning strikes or large voltage and high current generated by grid fluctuations, it is easy to burn out, making it difficult to guarantee the safety of the subsequent drive circuit. A transient voltage suppressor diode (TVS, Transient VoltageSuppressor) is integrated around the constant current diode Finally, the anti-surge capability of the constant current diode and the entire drive system can be enhanced, and the reliability is greatly improved

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