Three-terminal vertical type constant current device with protective function and manufacturing method thereof

Abstract

The invention provides a three-terminal vertical type constant current device with a protective function and a manufacturing method thereof. The device comprises a constant device structure and a bidirectional transient voltage suppression diode structure which are integrated on the same silicon chip, wherein the constant device structure and the bidirectional transient voltage suppression diode structure share an N-type doping substrate, a third P-type heavily doped region and an anode. The constant current device structure also comprises a first diffusion P-type well region, an N-type heavily doped region, a first P-type heavily doped region, an N-type channel region, a first oxidation layer and a first metal cathode. The bidirectional transient voltage suppression diode structure also comprises a second P-type heavily doped region, a second oxidation layer and a second metal cathode. According to the three-terminal vertical type constant current device, the bidirectional transient voltage suppression diode and the constant current device are integrated together, so that the constant current device has certain surge resistance capacity, the reliability of the constant current device and the reliability of a system consisting of the constant current device are improved, and the area is greatly decreased.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a vertical constant current device with three terminals with built-in protection functions and a manufacturing method thereof. Background technique [0002] The constant current source is a commonly used electronic equipment and device, and it is widely used in electronic circuits. The constant current source is used to protect the entire circuit, even if the voltage is unstable or the load resistance changes greatly, it can ensure the stability of the supply current. A constant current diode (CRD, Current Regulative Diode) is a semiconductor constant current device, which uses a two-terminal junction field effect transistor as a constant current source instead of an ordinary constant current composed of multiple components such as transistors, voltage regulator tubes, and resistors. The source can maintain a constant current value within a certain working ran...

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Problems solved by technology

However, the current constant-current devices cannot cope with the harsh external environment. It is easy to burn out in the case of lightning strikes or large voltages and high currents generated by grid fluctuations, which makes it difficult to guarantee the safety of subsequent drive circuits. In constant-current devices After the peripheral integrated transient voltage suppressor diode (TVS, Transient Voltage Suppressor), the anti-surge capability of the constant current device and the entire drive system can be enhanced, and the reliability is greatly improved

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