Multi-beam-array galvanometer scanning system
A galvanometer scanning and multi-beam technology, used in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problem of low single beam scanning efficiency, reduce processing time and processing cost, and increase processing efficiency.
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[0026] Such as Figures 1 to 4 As shown, a multi-beam array galvanometer scanning system designed in the present invention includes a light inlet 1, an X-axis array galvanometer system 2, a Y-axis galvanometer system 3, a light outlet 4, and a galvanometer frame structure 5. The mirror frame structure 5 is equipped with an X-axis array galvanometer system 2 and a Y-axis galvanometer system 3. The X-axis array galvanometer system 2 or the Y-axis galvanometer system 3 is composed of a plurality of galvanometers whose axes are parallel to each other. , the laser beam expanded by the beam expander enters the array galvanometer scanning system through the light inlet 1, and the beam reaches the X-axis array galvanometer system 2 or the Y-axis galvanometer system 3 and is divided into n parallel beams with the same light intensity , the parallel light beam passes through the light outlet 4 and is focused by the F-θ mirror onto the forming plane to form a group of n light spots. The...
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