A self-selectively modified nanowire biosensor and its preparation method

Abstract

The invention discloses a self-selectively modified nano wire biosensor and a preparation method thereof. The nano wire biosensor comprises a semiconductor substrate, an isolation layer, an active layer, an interlayer medium, contact holes, metal interconnections, a passivation layer, a modification window, a probe test window, a probe test window and a back side electrode. The modification window is formed in a nano wire channel, and a to-be-tested molecule is excellent in self selection, only specifically is bonded to -OH groups located o the surface of the nano wire channel, and the hydrophobic surface without -OH group of the modification window isn't modified. On the surface of the nano wire channel, the modification density of biomolecules is high, the signal intensity is high, and the sensing sensitivity is high. The area needs to be modified is regulated through defining the position of the modification window. Through introduction of the back side electrode, the potential state of the nano wire channel can be adjusted, and most sensitive sensing is achieved. The method is completely compatible with conventional integrated circuit manufacture technology, and is simple in process and low in cost.

Description

technical field [0001] The invention relates to a biosensor, in particular to a self-selectively modified nanowire biosensor and a preparation method thereof. Background technique [0002] Since the invention of the integrated circuit, the performance of the chip can be effectively improved by continuously reducing its feature size and integrating other micro-mechanical system components. In recent years, the combination of micro-nano technology and biotechnology has attracted widespread attention from academia and industry. This miniature biosensor is a component that uses biologically active units (such as enzymes, antibodies, nucleic acids, cells, etc.) as sensitive units to convert biological information into electrical signals to monitor biological signals in the environment. Nanowires have a high surface area to volume ratio and meet the sensitivity requirements of biosensing, so they are considered as one of the most promising biosensing devices. [0003] The resear...

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Problems solved by technology

However, this kind of nanowires formed by chemical growth of catalysts has no uniform direction and cannot achieve precise positioning of devices. It is also incompatible with traditional integrated circuit manufacturing technologies and needs further optimization.

There are other reports showing that proteins and nucleic acids can be detected by using the conductance-sensitive properties of nanowires, but the signal strength obtained is not enough. The reason is that the specific modification of nanowires by biomolecules cannot be achieved, resulting in Modified molecules are not enriched enough

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