Probe card for integrated circuit detection

Abstract

The invention discloses a probe card for integrated circuit detection, which comprises a probe holder and a detection circuit board. The probe card is provided with a gear stopping part in its formation. The lower end of the gear stopping part abuts against an elastic bag casing. The elastic bag casing is filled with gas. The elastic bag casing is provided with an air outlet in its formation. The air outlet is articulated with a sealing door. The side wall of the probe hole at one side of the sealing door is provided with an air ventilation groove. The side wall of the air ventilation groove is provided with an air pushing piston block. The air pushing piston block divides the air ventilation groove into an air ventilation area and a restoration area. The restoration area is provided therein with a restoration spring. One end of the restoration spring presses and leans against the air pushing piston block while the other end presses and leans against the inner side wall of the end part of the air ventilation groove. The probe hole is inserted by and connected with a vertically standing conducting strip. The upper end of the conducting strip is flexibly connected with the upper end and the lower end of the gear stopping part and is connected to the detection circuit board. The probe card of the invention has a simple structure and is convenient to manufacture and assemble. The probe card can also avoid the contact failure caused by the machinery fatigue of the spring mounted in a traditional probe card in the prior art.

Description

[0001] Technical field: [0002] The invention relates to the technical field of integrated circuit testing equipment, in particular to a probe card for testing integrated circuits. [0003] Background technique: [0004] The probe card is a component commonly used for detecting circuits in semiconductor technology, and a plurality of probes are arranged in it, and the arrangement position of the probes corresponds to the circuit configuration on the circuit board to be tested by the probe card. The probe card is usually set on a testing machine, and the circuit board to be tested is clamped by a tool and pressed on the probes, so that each probe conducts the circuit on the circuit board to be tested, and the probes are used to detect the circuit board to be tested. Whether the circuit on the circuit board is working properly. [0005] The existing probe structure generally includes a sleeve, in which there are two electrodes and a spring connected between the two electrodes, ...

AI Technical Summary

Problems solved by technology

[0006] The probe is a tiny component with a complex structure, making it difficult to manufacture and assemble the parts

The existing probes use springs as conductive elements, and after the springs are permanent, they will cause poor contact due to mechanical fatigue failure. Therefore, errors in this process often lead to poor contact of the probes and cannot conduct the circuit board under test and the detector. tower

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