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Mlu based accelerometer using a magnetic tunnel junction

一种加速计、加速度向量的技术，应用在使用惯性力进行加速度测量、测量加速度、多维加速度测量等方向，能够解决高成本等问题，达到低静态功耗、高灵敏度的效果

Inactive Publication Date: 2017-03-08
CROCUS TECHNOLOGY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] Different design approaches that try to help stabilize already small capacitance measurements (measured in femtofarads) often introduce higher costs in the fabrication process

Method used

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  • Mlu based accelerometer using a magnetic tunnel junction
  • Mlu based accelerometer using a magnetic tunnel junction
  • Mlu based accelerometer using a magnetic tunnel junction

Examples

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Embodiment Construction

[0030] The principle of the invention is to replace the capacitance in the MEMS accelerometer by an MLU stack (which can be considered as a variable resistor). Accelerometers will still be based on proof-mass systems. However, the comb architecture required for capacitive accelerometers is not required.

[0031] According to one embodiment, in Figure 4 A top view of a two-dimensional MLU-based accelerometer 100 is shown in . The MLU-based accelerometer 100 includes a proof-mass 6 comprising a ferromagnetic material with a proof-mass magnetization 60 oriented in a predetermined direction that induces a proof-mass field 61 . Proof mass 6 is suspended by spring elements 62 such that when accelerometer 100 is subjected to an acceleration vector, proof mass 6 deflects in a direction opposite to the direction of the acceleration vector. exist Figure 4 In the example of , the two-dimensional MLU-based accelerometer 100 includes four flexible beams 62 that act as spring elements...

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PUM

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Abstract

The present disclosure concerns an MLU-based accelerometer comprising: at least one MLU cell comprising a tunnel barrier layer between a first magnetic layer having a fixed first magnetization direction and a second magnetic layer having a second magnetization direction that can be varied; a proof-mass comprising a ferromagnetic material having a proof-mass magnetization inducing a proof-mass field, the proof-mass being elastically suspended such as to be able of being deflected in at least one direction when subjected to an acceleration vector, the proof-mass being magnetically coupled to said at least one MLU cell via the proof-mass field; and a read module configured for determining a magnetoresistance of each of said at least one MLU cell such as to determine an acceleration vector from the deflection of the proof-mass relative to any one of said at least one MLU cell.

Description

technical field [0001] The present invention relates to accelerometer devices with increased sensitivity. Background technique [0002] Accelerometers are MEMS devices used to measure acceleration forces. Traditional applications include vibration measurement, earthquake detection, and seismic applications. One of the most common uses for MEMS accelerometers is in airbag deployment systems in cars and potentially in all smartphones and tablets. The widespread use of accelerometers in the automotive and mobility industries has significantly reduced their cost. In the current market, single-axis, two-axis and three-axis models are commonly available. Since the introduction of the first micro accelerometers, the performance of capacitive accelerometers has improved significantly. [0003] The displacement accelerometer measures the displacement of the suspended proof mass in response to an input acceleration. figure 1 (Left) shows a schematic diagram of a capacitance-based...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/14G01P15/08G01P15/18G01R33/09
CPCG01D5/145G01P15/0802G01P15/0885G01P15/18G01R33/098G01P15/105
Inventor A.阿劳尤伊
Owner CROCUS TECHNOLOGY
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