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Electron beam current constant condition-based electron gun filament heating current automatic setting method

A technology of electron beam current and heating current, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems that the service life of the cathode of the electron beam filament can not be taken into account, and achieve the effect of prolonging the life

Active Publication Date: 2017-03-22
GUILIN THD TECH CO LTD
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is that the existing electron beam processing equipment cannot take into account both the quality of the electron beam and the service life of the filament cathode, and provides an automatic setting method for the heating current of the electron gun filament based on the constant electron beam current

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  • Electron beam current constant condition-based electron gun filament heating current automatic setting method
  • Electron beam current constant condition-based electron gun filament heating current automatic setting method
  • Electron beam current constant condition-based electron gun filament heating current automatic setting method

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Embodiment Construction

[0028] The principle of the present invention based on the electron gun filament heating current automatic setting method with constant electron beam current is as follows:

[0029] The acceleration voltage of the three-pole Pierce electron gun is stabilized at U a value, the electron beam current is stable at I E Value, after the filament current reaches a certain value, the grid bias voltage -U G vs. filament current I K It is an exponential function relationship with the natural number e as the base, such as figure 1 shown. Define the filament current I K with minimum filament current I Kmin The difference is the relative filament current I k =I K -I Kmin , defining the gate bias voltage -U G with the minimum gate bias voltage -U Gmin The difference is the relative gate bias voltage -U g =-U G -(-U Gmin )=ψ(I k ), then after the filament current exceeds a certain value, the relative grid bias voltage -U g with relative filament heating current I k The relati...

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Abstract

The present invention discloses an electron beam current constant condition-based electron gun filament heating current automatic setting method. The working current of a filament is calculated through changing the magnitude of the current of the filament under an electron beam current constant condition. According to the method of the invention, judgment and control are performed on the quantification of the saturation degree of the heating current of the filament, so that the high quality performance of the electron beams of a triode pierce type electron gun can be fully exerted, and the service life of the cathode of the filament can be prolonged to the greatest extent.

Description

technical field [0001] The invention relates to the technical field of electron beam processing equipment, in particular to an automatic setting method for heating current of an electron gun filament based on a constant electron beam current. Background technique [0002] Electron beam processing equipment using an axisymmetric Pierce electron gun, the cathode emits electron beams subject to a temperature-limited state and a space-charge-limited state. In order to improve the quality of the electron beam, the temperature limit state of the existing electron beam processing equipment is saturated emission, and in the space charge limit state, the accelerating voltage is a constant value, and the grid bias voltage -U is changed b To change the effective emission area of ​​the cathode to control the electron beam current, the cathode (filament) adopts a constant current control method. [0003] However, due to the difference in materials and geometric dimensions between differ...

Claims

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Application Information

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IPC IPC(8): H01J37/24
CPCH01J37/242
Inventor 韦寿祺黄小东费翔陆苇秦玉江郭华艳
Owner GUILIN THD TECH CO LTD
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