The invention relates to the technical field of field emission
electron sources, and discloses a method for in-situ preparation of a
crystal electron source based on a transmission
electron microscope. According to the method provided by the invention, in the TEM high-
vacuum chamber, in-situ controllable physical or
electric heating excitation is carried out on the
cathode material by using the nano-hand, so that single-
crystal or polycrystal nano-particles with clear sizes, shapes and
crystal structures can be controllably prepared in a specific area on the surface of the
cathode material; surface pollutants are also removed in the process, so that the preparation is clean; after preparation is completed, in-situ field emission testing can be carried out immediately, it is ensured that the tested performance is intrinsic performance of the
cathode material and an ideal structure, and performance degradation caused by disjunction of preparation, transfer and testing links in a traditional method is thoroughly avoided; by utilizing the method, the high-reliability
electron source with an ideal nano structure, a clean surface and excellent field emission performance can be directly produced, and the conversion efficiency and the reliability of the high-performance
electron source from
laboratory research to tip instrument commercialization are greatly promoted.