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A control device and control method for the precision of a cassette

A control method and technology of a control device, which are applied in the manufacture of semiconductor/solid-state devices, electrical components, circuits, etc., can solve the problem that photoelectric sensors cannot be detected, and achieve the effect of improving efficiency

Active Publication Date: 2020-08-25
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Chinese patent CN201110233567.x introduces a mechanism for detecting the placement state of a film cassette, but its placement function adopts a single-point photoelectric sensor detection method, because when the film cassette is placed on the film library, there will be various forms of Deviation, if the cassette is just in the state of crossing or sideways, the photoelectric sensor will not be able to detect, and the wrongly placed cassette will enter the silicon wafer transmission subsystem for operation

Method used

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  • A control device and control method for the precision of a cassette
  • A control device and control method for the precision of a cassette
  • A control device and control method for the precision of a cassette

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Embodiment Construction

[0023] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0024] figure 1 It is a schematic diagram of the mechanical mechanism of the film library involved in the device. Such as figure 1 As shown, the cassette carrying device includes a cassette placement fixing pin 10 , a cassette placement precision control device 20 , a cassette locking device 40 , a locking detection sensor 50 , a cassette locking device servo motor 60 and a cassette mounting plate 30 .

[0025] figure 2 It is a cross-sectional view of the mechanical structure of the film library involved in the device. Such as figure 2 As shown, the cassette placement precision device 20 is located on both sides of the cassette locking device 40 . The cassette locking device 40 includes a moving plate 41 of the cassette locking device, a sliding guide rail 42 and a fixed plate 43 of the cassette locking device.

[0026] image 3 It is...

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Abstract

The invention discloses an accuracy control device of a slice box. The accuracy control device comprises a motion unit, a guide unit, a power unit and a detection unit, wherein the motion unit is used for compressing the power unit to a trigger range of the detection unit along the guide unit when the slice box is placed on a slice library, and whether the slice box is correctly placed on the slice library or not is judged according to a trigger condition of the detection unit.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a control device and a control method for the precision of a chip box. Background technique [0002] The development of microelectronics technology has promoted the upgrading of computer technology, communication technology and other electronic information technologies, and plays an important leading and basic role in the information industry revolution. Photolithography is an indispensable tool in the manufacturing of microelectronic devices . The silicon wafer transfer subsystem is an important component subsystem of the advanced packaging lithography machine. In the silicon wafer transmission subsystem, the wafer library, as a direct interface between materials and equipment, must meet the requirements of high efficiency, high automation, and high security. [0003] With the demand of the market, the tolerance of the lithography machine to the misope...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67259H01L21/67265
Inventor 黄明王邵玉
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD