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Fixed abrasive wire saw and method for dressing fixed abrasive wire

A technology of fixing abrasive grains and wire saws, which is applied to the parts of grinding machine tools, grinding machines, grinding/polishing equipment, etc., to improve cutting efficiency and avoid complications

Active Publication Date: 2020-01-07
RIIDO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if the wire saw is viewed from the operational point of view such as maintainability, it may not be possible to say that sufficient consideration has been given to the arrangement relationship between the workpiece table for holding the blank and the trimming stone, and there are still design gaps. room for improvement

Method used

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  • Fixed abrasive wire saw and method for dressing fixed abrasive wire
  • Fixed abrasive wire saw and method for dressing fixed abrasive wire
  • Fixed abrasive wire saw and method for dressing fixed abrasive wire

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Embodiment Construction

[0031] Figure 1-Figure 6 One Embodiment of the fixed abrasive wire saw of this invention is shown. The fixed abrasive wire saw 1 of the present embodiment is as follows figure 1 as well as figure 2 Shown are: a fixed abrasive filament 2 in which abrasive grains are adhered to the surface of the core wire by metal plating; a plurality of grooved rolls 3-5 with rotating shafts arranged in parallel to each other; a workpiece supply table on which a workpiece W is fixed 6; and dressing stones 41 and 42 for dressing the fixed abrasive wire 2 by contacting the above-mentioned fixed abrasive wire 2, the above-mentioned workpiece W is sliced ​​into a plurality of wafers by being pressed on the wire row 30, and the above-mentioned wire row 30 is The fixed abrasive filaments 2 are formed by being wound between grooved rolls 3-5. In addition, if figure 2 or image 3 As shown, in the present embodiment, a silicon ingot is used as the workpiece W, and the silicon ingot is formed in...

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Abstract

The present invention provides a fixed abrasive wire saw and a fixed abrasive wire dressing method, which are applied in consideration of maintainability, etc. for the arrangement relationship between a workpiece table holding a workpiece and a dressing stone for dressing the fixed abrasive wire On the basis of aspects, a more reasonable design has been implemented. It has a fixed abrasive wire (2), a workpiece supply table (6) with a workpiece fixing part (15) for fixing a workpiece (W), and a dressing stone (41). Between the grooved rollers (3)-(5), there is formed a wire row (30) arranged along the feed direction of the grooved rollers, and the dressing stone is fixed on the above-mentioned workpiece supply table adjacent to the workpiece fixing part. A position on the upstream side of the workpiece fixing portion in the feed direction.

Description

technical field [0001] The invention relates to a fixed abrasive wire saw for cutting workpieces composed of hard and brittle materials such as silicon, glass, and ceramics, and a method for dressing the fixed abrasive wire. Background technique [0002] Conventionally, a wire saw (ie, a cutting device using a wire) is known as one of apparatuses for cutting a workpiece (ie, a compact) made of a hard and brittle material to manufacture a plurality of thin plates (wafers). The above-mentioned wire saw is configured such that a core wire such as a piano wire is placed in parallel between a plurality of grooved rollers to form a spiral wire row, and cutting is performed by pushing the compact against the high-speed running wire of the wire row, and cutting the wire saw. The billet is cut into multiple wafers. As the cutting method of the above-mentioned wire saw, there are a cutting method based on a free abrasive method in which a machining liquid (ie, slurry) containing free...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D5/04B24B27/06B24B53/12
CPCB24B27/0633B24B53/12B28D5/045B24B53/00B28D1/08B28D5/042
Inventor 熊泽贤一
Owner RIIDO