Preparation method for high-resolution thermoplastic polymer patterns by using room temperature reverse-imprinting technique
A thermoplastic polymer, high-resolution technology, applied in coatings and other directions, can solve the problems of long time, expensive equipment, high temperature and high pressure, etc., to achieve the effect of short time consumption, avoiding high temperature and high pressure energy consumption, and improving patterning efficiency
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Embodiment 1
[0024] Step 1: Dissolution of thermoplastic polymer
[0025] Solid polymethyl methacrylate (PMMA) was heated and dissolved in acetone solution by ultrasonic heating to prepare a PMMA solution with a mass concentration of 0.5%.
[0026] Step 2: Preparation of soft template
[0027] Weigh the prepolymer of polydimethylsiloxane (PDMS) and initiator, the mass ratio is 10:1, stir and mix; then cast on a silicon template with a strip width of 3 μm and a spacing of 1 μm, at 60 ° C Curing in an environment; After curing, the PDMS is separated from the silicon template to obtain a PDMS soft template.
[0028] Step 3: Spin coating thermoplastic polymer on the surface of soft template
[0029] Under the conditions of rotation speed of 4000rpm and rotation time of 30s, the PMMA solution was spin-coated on the surface of the PDMS soft template, and PMMA did not completely fill the depression of the soft template structure.
[0030] Step 4: Hydrophilicization of the thermoplastic polymer...
Embodiment 2
[0037] Step 1: Dissolution of thermoplastic polymer
[0038] Solid polystyrene (PS) was heated and dissolved in acetone solution by ultrasonic heating, and a PS solution with a mass concentration of 1% was prepared.
[0039] Step 2: Preparation of soft template
[0040] Weigh the prepolymer of polydimethylsiloxane (PDMS) and initiator, the mass ratio is 10:1, stir and mix; then cast on a silicon template with a strip width of 1 μm and a spacing of 1 μm, at 60 ° C Curing in an environment; After curing, the PDMS is separated from the silicon template to obtain a PDMS soft template.
[0041] Step 3: Spin coating thermoplastic polymer on the surface of soft template
[0042] Under the conditions of rotation speed of 6000rpm and rotation time of 60s, the PS solution was spin-coated on the surface of the PDMS soft template, and the PS did not completely fill the depression of the soft template structure.
[0043] Step 4: Hydrophilicization of the thermoplastic polymer on the sur...
Embodiment 3
[0050] Step 1: Dissolution of thermoplastic polymer
[0051] Solid polymethyl methacrylate (PMMA) was heated and dissolved in acetone solution by ultrasonic heating to prepare a PMMA solution with a mass concentration of 1%.
[0052] Step 2: Preparation of soft template
[0053] Weigh the prepolymer of polydimethylsiloxane (PDMS) and the initiator, the mass ratio is 10:1, stir and mix; then cast on a silicon template with a grid width of 1 μm and a spacing of 1 μm, at 60 ° C Curing in an environment; After curing, the PDMS is separated from the silicon template to obtain a PDMS soft template.
[0054] Step 3: Spin coating thermoplastic polymer on the surface of soft template
[0055] Under the conditions of rotation speed of 6000rpm and rotation time of 60s, the PMMA solution was spin-coated on the surface of the PDMS soft template, and PMMA did not completely fill the depression of the soft template structure.
[0056] Step 4: Hydrophilicization of the thermoplastic polyme...
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