High-performance torque sensor based on sputtering film technology

Abstract

The invention discloses a high-performance torque sensor based on a sputtering film technology. The sensor comprises a transfer upper flange, a transfer lower flange and a torque post, wherein the torque post is connected between the transfer upper flange and the transfer lower flange. The high-performance torque sensor is characterized in that the torque post is a metal post characterized in that film sensitive elements are respectively made on two opposite parallel surfaces by a sputtering technology; arc-shaped grooves are processed in the other two opposite parallel surfaces. Four strain sensitive resistors form a Wheatstone bridge circuit; when the transfer upper and lower flanges twist, the torque post receives the twisting force effect and transfers the effect to strain sensitive resistors; the resistance values of the strain sensitive resistors change; the Wheatstone bridge circuit loses the balance; the corresponding torque value can be obtained through measuring the output signal of the Wheatstone bridge circuit. The sputtering film technology is used, so that the stain sensitive element is directly manufactured on an elastic shaft; the hysteresis error, repeatability error and the temperature drift error of the sensor are greatly reduced; the measuring precision of the sensor is improved; the structure of the sensor is simple; the processing is easy.

Description

technical field [0001] The invention relates to a torque sensor, in particular to a high-performance torque sensor which uses sputtering thin film technology to manufacture strain sensitive elements. Background technique [0002] In a mechanical transmission system, torque is one of the important parameters reflecting system performance. Torque measurement has been widely used in many industries or fields such as aerospace, military equipment, construction machinery, ships, drilling, transportation, metallurgy, power generation, and mining equipment. There are many torque measurement methods, among which the traditional strain measurement method is widely used. The strain type torque sensor is to paste the metal strain gauge on the elastic shaft to form a strain bridge. When the elastic shaft is deformed by torque, the resistance value of the bridge will change, and the corresponding torque value will be obtained by measuring the change in resistance value. [0003] The ex...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a high-performance torque sensor based on sputtering thin film technology, aiming at the deficiencies of the prior art, to solve the problems of hysteresis error, repeatability error and temperature drift error of traditional strain-type torque sensor, low measurement accuracy and inadaptability working in harsh environments

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