Thin film strain type torque sensor

Abstract

The invention discloses a thin film stain type torque sensor which is composed of an upper adapter flange, a lower adapter flange and a torsion column fixedly connected between the upper adapter flange and the lower adapter flange. The sensor is characterized in that the torsion column is a metal column; arc-shaped grooves are machined in a left side face and a right side face of the metal column correspondingly; triangular holes are machined in an upper portion and a lower portion of the metal column correspondingly; and four thin film sensing elements, provided with four strain sensitive resistors, manufactured by adoption of a thin film sputtering technology are arranged on one side plane of the metal column. The four strain sensitive resistors are assembled into a Wheatstone bridge circuit; and when the upper adapter flange and the lower adapter flange are twisted, the Wheatstone bridge circuit loses balance, and a corresponding torque value can be obtained by measuring an output signal of the Wheatstone bridge circuit. Since the thin film sputtering technology is adopted, the strain sensitive elements are directly manufactured and arranged on an elastic shaft, a hysteresis error, a repeatability error and a temperature drift error of the sensor are greatly reduced, and the measurement precision of the sensor is improved. The sensor is simple in structure and easy to machine.

Description

technical field [0001] The invention relates to a torque sensor, in particular to a thin film strain type torque sensor which adopts sputtering thin film technology to manufacture strain sensitive elements. Background technique [0002] In a mechanical transmission system, torque is one of the important parameters reflecting system performance. Torque measurement has been widely used in many industries or fields such as aerospace, military equipment, construction machinery, ships, drilling, transportation, metallurgy, power generation, and mining equipment. There are many torque measurement methods, among which the traditional strain measurement method is widely used. The strain type torque sensor is to paste the metal strain gauge on the elastic shaft to form a strain bridge. When the elastic shaft is deformed by torque, the resistance value of the bridge will change, and the corresponding torque value will be obtained by measuring the change in resistance value. [0003]...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a thin-film strain type torque sensor, aiming at the deficiencies of the prior art, to solve the traditional strain type torque sensor hysteresis error, repeatability error, large temperature drift error, low measurement accuracy, not suitable for working in harsh environments and other problems

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