The application discloses a micro
strain type six-dimensional
force sensor and a calibration device thereof. The sensor comprises an elastic body, three groups of moment measuring strain gauges, three groups of force measuring strain gauges and a circuit board. The elastic body comprises a fixing stud, a base, four inverted L-shaped sensitive beams and a force guide column which are sequentially connected in an integrated manner from bottom to top. The four inverted L-shaped sensitive beams are evenly distributed along the circumference of the base. Each inverted L-shaped sensitive beam comprises a vertical floating beam and a horizontal cross beam which are connected in an integrated manner. The three groups of moment measuring strain gauges are respectively attached to the upper and lower sides and the left and right sides of the horizontal cross beam. The three groups of force measuring strain gauges are respectively attached to the inner and outer sides of the vertical floating beam. The circuit board is clamped on the base and located between the four vertical floating beams. The three groups of moment measuring strain gauges and the three groups of force measuring strain gauges are respectively electrically connected with the circuit board. The application has the advantages of high sensitivity, good
isotropy and low inter-dimension
coupling and is suitable for six-dimensional force measurement of a mechanical finger tip or a small
robot wrist.