A dual-dielectric broadband infrared absorbing metamaterial and its design method
A metamaterial and dual-media technology, applied in optics, instruments, optical components, etc., can solve the problems of complex design, limited bandwidth, and poor applicability, and achieve the effect of convenient design, easy fabrication, and simple structure
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Embodiment 1
[0025] Dual-dielectric infrared absorbing metamaterials with a broadband absorption range of 5-8 μm, from bottom to top are TiN thin film, ZnSe thin film, MgF thin film and Al grating.
[0026] The thickness of the TiN film is 200nm, the thickness of the ZnSe film is 400nm, the thickness of the MgF film is 500nm, and the thickness of the Al grating is 60nm. The unit structure of the Al grating is composed of metal squares, the side length of the metal square is 1.7 μm, and the unit period is 5 μm. The simulation results obtained by the strict coupled wave method are as follows: figure 2 As shown, in the range of 5 μm-8 μm, the bandwidth of this embodiment at 80% absorption rate is 1.9 μm.
Embodiment 2
[0028] Dual-dielectric infrared absorbing metamaterials with a broadband absorption range of 8-14 μm, from bottom to top are TiN thin film, Ge thin film, ZnO thin film and Al grating.
[0029] The thickness of the TiN film is 200nm, the thickness of the Ge film is 600nm, the thickness of the ZnO film is 200nm, and the thickness of the Al grating is 130nm. The unit structure of the Al grating is composed of metal squares, the side length of the metal square is 2 μm, and the unit period is 5 μm. The simulation results obtained by the strict coupled wave method are as follows: image 3 As shown, in the range of 8 μm-14 μm, the bandwidth of this embodiment at 80% absorption rate is 3.7 μm.
[0030] In summary, the present invention is convenient in design, simple in structure and easy to manufacture. In the range of 5 μm-8 μm, the bandwidth of the present invention at 80% absorption rate reaches 1.9 μm; in the range of 8 μm-14 μm, the bandwidth of the present invention at 80% ab...
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