Terahertz wave polarization conversion and unidirectional transmission device with double-layer dielectric-metal grating structure
A metal grating and polarization conversion technology, applied in the field of terahertz applications, can solve the problems of polarization conversion rate, isolation, insertion loss working bandwidth that cannot meet the application system, low forward transmission transmittance, affecting device practicability, etc. Achieve the effect of overcoming the shortcomings of single function, low material cost and simple structure
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[0024] The terahertz wave polarization conversion and unidirectional transmission device with a double-layer dielectric-metal grating structure involved in the present invention will be described in detail below with reference to the accompanying drawings.
[0025] figure 1 It is a structural schematic diagram of a terahertz wave polarization conversion and unidirectional transmission device with a double-layer dielectric-metal grating structure in an embodiment of the present invention, and the structure is as follows. A dielectric grating layer with a period of 50 μm, a gate ridge width of 30 μm, and a gate groove depth of 200 μm is etched on one side of a high-resistance silicon wafer with a thickness of 500 μm. The resistivity of the high-resistance silicon is greater than 10KΩ·cm. A metal grating layer with a period of 20 μm and a metal grid strip width of 14 μm is plated on the other side of the substrate, the metal material is gold, and the thickness of the gold layer is ...
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