Method for preparing non-evaporable thin film getter

Abstract

The invention discloses a method for preparing a non-evaporable thin film getter. The method comprises the steps that a plurality of gettering metals are placed in a plurality of evaporation boats of a coating machine in a one-to-one correspondence mode to serve as target materials, the kind of the gettering metals is at least two, the working parameters of each evaporation boat are separate and controllable, and film thickness monitors are arranged on all the evaporation boats in a one-to-one correspondence mode so that the evaporation rates of the gettering metals in the corresponding evaporation boats can be monitored; substrates and the evaporation boats are put into a vacuum cavity of the coating machine; the interior of the vacuum cavity is vacuumized; the gettering metals are pre-molten, and the working parameters of all the evaporation boats are controlled, so that all the gettering metals are evaporated at the same time; and the working parameters of the evaporation boats are adjusted according to the feedback value of the film thickness monitors so that the evaporation rates of all the gettering metals can be adjusted into the preset ratio. According to the method for preparing the non-evaporable thin film getter, the various gettering metals can be evaporated at the same time, and alloy does not need to be manufactured additionally, so that the preparation cost of the getter is beneficially reduced, and the preparation time is beneficially saved; and meanwhile, the components of the getter can be precisely controlled by controlling the evaporation rates of all the gettering metals.

Description

technical field [0001] The invention relates to a method for preparing a thin film getter, in particular to a method for preparing a non-evaporable thin film getter. Background technique [0002] Getter, also known as getter, is a general term for a preparation or device that can effectively absorb certain gas molecules by using its own physical or chemical properties, and is used to obtain, maintain vacuum and purify gas. Getters are widely used in optoelectronic devices that require a vacuum environment, creating a good working environment for the device, stabilizing the characteristic parameters of the device, and having an important impact on the performance and service life of the device. [0003] Getters are generally divided into two categories: evaporative and non-evaporable. Among them, evaporable getters mainly absorb the residual active gas in vacuum devices through chemical reactions, and need to heat the getter metal to evaporate to form a getter film; The evap...

AI Technical Summary

Problems solved by technology

These methods increase the workload and cost, and the uniformity and particle size of the alloy need to be controlled well