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PSD-based (position sensitive detector-based) signal processing method

A signal and sensor unit technology, applied in the field of photoelectric detection, can solve problems such as high cost, inaccurate detection, and measurement error, and achieve the effects of reducing the size of the device, accurate detection results, and wide application range

Active Publication Date: 2017-06-13
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

However, the PSD itself is an analog device, which is greatly affected by factors such as the environment and the performance of other devices in the processing circuit. Therefore, it is necessary to overcome and reduce various factors that affect the performance of the PSD.
The output signal of the PSD is processed by two independent processing channels. When the signal modulation mode is used, if the gain coefficients of the two channels are inconsistent, measurement errors will be caused. The existing laser micro-displacement measurement systems usually have inaccurate detection and high cost. higher disadvantage

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  • PSD-based (position sensitive detector-based) signal processing method
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  • PSD-based (position sensitive detector-based) signal processing method

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Embodiment Construction

[0024] The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are illustrated. The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. The technical solution of the present invention will be described in various aspects below in conjunction with various figures and embodiments.

[0025] "First" and "second" in the following are for distinction in description and have no other special meanings.

[0026] figure 1 It is a sch...

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Abstract

The invention discloses a PSD-based signal processing method. The PSD-based signal processing method comprises that laser emitted by a laser device is irradiated onto the photosensitive surface of a PSD unit after being attenuated, and the PSD unit outputs detecting current signals; the detecting current signals are pretreated, and based on a PSD current-position coordinate calculating formula, a laser position coordinate of the PSD unit on the photosensitive surface. The PSD-based signal processing method achieves add, subtraction and division operations through software, thereby simplifying a hardware circuit, reducing device size, effectively reducing noise and temperature excursion led by analog devices, improving the measuring precision, achieving accurate and reliable detecting results and being applicable to various environments.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a PSD-based signal processing method. Background technique [0002] In industrial production, the on-line detection of the geometric characteristics of many products not only requires non-contact continuous measurement, but also requires that the accuracy is not affected by the movement of the measured object and the external environment. The laser micro-displacement measurement system can not only better meet these requirements, but also has the advantages of high measurement accuracy, long measurement distance, and strong repeatability. Therefore, the laser micro-displacement measurement system is more and more used in industrial production. The photoelectric sensors used in the laser micro-displacement measurement system mainly include CMOS, CCD, PSD and so on. PSD position sensitive detector is a semiconductor photoelectric detection element that can convert ...

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Application Information

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IPC IPC(8): G01D5/26
CPCG01D5/26
Inventor 程智董登峰周维虎
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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