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A mass thickness of 400 ~ 2000μg/cm 2 Preparation process of self-supporting ir target

A technology of mass thickness and preparation process, which is applied in the field of nuclear technology applications, can solve the problems of target film curling, inapplicability, poor flatness, etc., and achieve the effect of good thickness uniformity

Active Publication Date: 2020-08-21
CHINA INSTITUTE OF ATOMIC ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, using the above method to prepare mass thickness greater than 400μg / cm 2 When the Ir target is self-supporting, the target film will be curled and the flatness is extremely poor, so it cannot be used in nuclear physics experiments

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] A mass thickness of 400 ~ 2000μg / cm 2 The preparation process of the self-supporting Ir target mainly includes the following five steps:

[0024] (1) Take copper foil with a thickness of 15 μm as the substrate, and use the focused heavy ion sputtering method to deposit a mass thickness of 250 μg / cm on the substrate by sputtering 2 The Ir deposition layer obtained copper-based Ir film;

[0025] (2) Place the copper-based Ir film obtained in step (1) on the surface of the nitric acid solution, wherein the copper-based surface directly contacts the nitric acid solution, and after the copper-based is completely corroded and dissolved by nitric acid, the Ir film separated from the copper-based in step (1) is obtained. Deposit layer; the mass fraction of the nitric acid is 50%.

[0026] (3) transfer the Ir deposition layer obtained in step (2) to the surface of deionized water using a glass slide to clean the nitric acid solution on the surface of the Ir deposition layer; ...

Embodiment 2

[0032] The difference from Example 1 is that the thickness of the copper foil in step (1) is 20 μm, and the thickness of the Ir deposition layer is 100 μg / cm 2 .

Embodiment 3

[0034] Unlike Example 1, the thickness of the Ir deposition layer in step (1) is 180 μg / cm 2 .

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Abstract

The invention belongs to the field of the application of a nuclear technology, and particularly relates to preparation technology of a self-supporting Ir target with 400-2000<mu>g / cm<2> mass thickness. The technology mainly comprises the following five steps of: (1) depositing an Ir deposition layer of which the mass thickness is 100-250<mu>g / cm<2> on a copper base lining by a focused heavy ion sputtering method to obtain a copper-based Ir film; (2) placing the copper-based Ir film on the surface of a salpeter solution, and performing standing till the copper base is completely dissolved with nitric acid in a corroded manner to obtain the Ir deposition layer separated from the copper base lining; (3) transferring the Ir deposition layer to the surface of deionized water by utilizing a glass slide to wash the salpeter solution on the surface of the Ir deposition layer; (4) fixing the washed Ir deposition layer by utilizing a target frame; and (5) using the Ir deposition layer obtained in the step (4) as a base lining, and depositing Ir on the base lining by utilizing the focused heavy ion sputtering method again till the self-supporting Ir target with required mass thickness is obtained. The preparation technology has the beneficial effect that the prepared self-supporting Ir target is good in smoothness and good in thickness uniformity.

Description

technical field [0001] The invention belongs to the field of nuclear technology applications, and in particular relates to a mass thickness of 400-2000 μg / cm required for nuclear physics experiments 2 Preparation process of self-supporting Ir target. Background technique [0002] A self-supporting target, as opposed to a lined target, refers to a target that is not supported by a carrier during use, and its thickness ranges from tens of nanometers to tens of microns. In many nuclear science researches, especially in low-energy nuclear physics, laser nuclear physics, atomic and molecular physics, astronomical nuclear physics and nuclear chemistry experiments, self-supporting targets are required as target membranes, peel-off membranes, X-ray mirrors or X-ray mirrors. Ray filters, etc. Self-supporting Ir target is one of the commonly used self-supporting targets. [0003] Common methods for preparing self-supporting targets include rolling method, magnetron sputtering metho...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34
CPCC23C14/3414
Inventor 樊启文胡跃明王华张榕
Owner CHINA INSTITUTE OF ATOMIC ENERGY