Photobleaching-based section adjustable asymmetric M-Z optical waveguide sensor and manufacture method therefor
A sensor, asymmetric technology, applied in the directions of optical waveguides, light guides, instruments, etc., can solve the problems of sensor sensing accuracy degradation, etc., and achieve the effect of solving the plate error
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0036] On the methyl methacrylate PMMA base sheet 1 (thickness of 1mm, rectangular structure, long side length of 5cm, short side length of 3cm;) using imprint template 2 (waveguide section width 2μm, height is 2μm. For low-precision MZ sensors, in area a, l a =5mm; In the area b, the branch distance d=60μm, the branch angle θ=0.5°, the parameters of a and b are respectively a=30μm, b=7.1774×10 -4 ; Select the lateral length l of the straight waveguide in the c area straight =10000μm, the radius of curvature of the arc R=4500μm, and the slope K=0.01296, the arc length of the curved waveguide in the c region can be obtained. arc =58.3299, the length of the sensing arm Ls=20235μm, the length of the reference arm Lr=20000μm, the length difference between the sensing arm (long arm) and the reference arm (short arm) △L=235μm (the sensing interval is (1.33~1.50)) . For M-Z sensors with high accuracy, in area a, l a =5mm; In the area b, the branch distance d=60μm, the branch angle θ=0...
Embodiment 2
[0040] In imprint template 2 (cross-sectional waveguide width 3μm, height 3μm,) for the low-precision M-Z sensor, in area a, l a =5mm; In the area b, the branch distance d=60μm, the branch angle θ=0.5°, the parameters of a and b are respectively a=30μm, b=7.1774×10 -4 ; Select the lateral length l of the straight waveguide in the c area straight =10000μm, the radius of curvature of the arc R=4500μm, and the slope K=0.01269, the arc length of the curved waveguide in the c region can be obtained. arc = 57.0974, the length of the sensing arm Ls = 20230.0000 μm, the length of the reference arm Lr = 20000 μm, the length difference between the sensing arm (long arm) and the reference arm (short arm) ΔL = 230.0000 μm. For high-precision M-Z sensors, in area a, l a =5mm; In the area b, the branch distance d=60μm, the branch angle θ=0.5°, the parameters of a and b are respectively a=30μm, b=7.1774×10 -4 ; Select the lateral length l of the straight waveguide in the c area straight =10000μ...
PUM
| Property | Measurement | Unit |
|---|---|---|
| Spacing | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


