Adsorption pad for TFT thinning and polishing
A technology for thinning polishing and adsorbing pads, applied in layered products, synthetic resin layered products, abrasive tools, etc., can solve the problems of high surface activity, long hydrophobic chain, low water solubility, etc. Damping anti-skid performance, avoiding the effect of high water absorption
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Embodiment 1
[0062] Adsorption pads for TFT thinning and polishing, the adsorption pads are sequentially provided with release paper, double-sided adhesive tape, PET film, double-sided adhesive tape, fluorine-containing polyurethane porous film and protective film from bottom to top; the fluorine-containing polyurethane porous film From top to bottom are the surface adsorption layer 1, the first foam layer 2, the second foam layer 3, the third isolation layer 4 and the fourth foam layer 5, the surface adsorption layer 1 is a dense layer; The first foam layer 2 and the second foam layer 3 both have a drop-shaped porous structure, and the drop-shaped pores of the second foam layer 3 are larger than those of the first foam layer 2 .
[0063] The fourth foam layer 5 is an elliptical porous structure with an average pore diameter of 200 μm, and the third isolation layer 4 is a mesh pore structure formed by circular micro-pores with a pore diameter of 9-20 μm.
[0064] The processing technology ...
Embodiment 2
[0090] Adsorption pads for TFT thinning and polishing, the adsorption pads are sequentially provided with release paper, double-sided adhesive tape, PET film, double-sided adhesive tape, fluorine-containing polyurethane porous film and protective film from bottom to top; the fluorine-containing polyurethane porous film From top to bottom are the surface adsorption layer 1, the first foam layer 2, the second foam layer 3, the third isolation layer 4 and the fourth foam layer 5, the surface adsorption layer 1 is a dense layer; The first foam layer 2 and the second foam layer 3 both have a drop-shaped porous structure, and the drop-shaped pores of the second foam layer 3 are larger than those of the first foam layer 2 .
[0091] The fourth foam layer 5 is an elliptical porous structure with an average pore diameter of 243 μm, and the third isolation layer 4 is a mesh-like pore structure formed by circular micro-pores with a pore diameter of 4.2-17.8 μm.
[0092] The processing te...
Embodiment 3
[0118]Adsorption pads for TFT thinning and polishing, the adsorption pads are sequentially provided with release paper, double-sided adhesive tape, PET film, double-sided adhesive tape, fluorine-containing polyurethane porous film and protective film from bottom to top; the fluorine-containing polyurethane porous film From top to bottom are the surface adsorption layer 1, the first foam layer 2, the second foam layer 3, the third isolation layer 4 and the fourth foam layer 5, the surface adsorption layer 1 is a dense layer; The first foam layer 2 and the second foam layer 3 both have a drop-shaped porous structure, and the drop-shaped pores of the second foam layer 3 are larger than those of the first foam layer 2 .
[0119] The fourth foam layer 5 is an elliptical porous structure with an average pore diameter of 205 μm, and the third isolation layer 4 is a mesh pore structure formed by circular micro-pores with a pore diameter of 2-14.3 μm.
[0120] The processing technology...
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