Threshold-adjustable MEMS inertial switch testing system

A technology of inertia switch and test system, applied in the field of test system of MEMS inertia switch, can solve the problem of inertia switch without test method and equipment, etc.

Pending Publication Date: 2017-06-30
SHENYANG LIGONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is no corresponding testing method

Method used

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  • Threshold-adjustable MEMS inertial switch testing system
  • Threshold-adjustable MEMS inertial switch testing system
  • Threshold-adjustable MEMS inertial switch testing system

Examples

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Embodiment Construction

[0022] Threshold adjustable MEMS inertial switch test system: including test circuit and impact system. The test circuit includes a MEMS inertial switch 17.

[0023] For attached figure 1 The structure of the MEMS inertial switch 17 shown uses LIGA technology according to the attached figure 2 The structural parameters and materials shown are processed.

[0024] The inertial switch 17 includes a movable electrode 1, a driving electrode 2, a dielectric layer 8, a first lower contact electrode 3, a second lower contact electrode 4, an upper contact electrode 5 and a substrate 6.

[0025] The movable electrode 1 is supported above the substrate 6 by an elastic support part.

[0026] The elastic support part is at least one beam 7 integrated with the movable electrode 1. In this embodiment, two can be selected. The outer ends (anchor areas) of the two beams 7 are fixed to the boss on the left side of the base plate 6. section.

[0027] The right side of the movable electrode 1 is connect...

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Abstract

The test system of MEMS inertial switch with adjustable threshold includes signal input system, including impact slider, impact rod and buffer device. The impact rod provides a monotonically increasing velocity, enabling the conversion of kinetic energy into elastic potential energy of the air spring in the shock absorber. The buffer device provides an acceleration signal input that first increases monotonically and then decreases monotonically. Signal output system, including test circuit, galvanometer and oscilloscope. The test circuit includes MEMS inertial switches. The test circuit uses the self-locking function of the inertia switch to realize the output of the signal. A galvanometer and an oscilloscope are used to measure the output signal of the test circuit. It makes up for the vacancy of the MEMS inertial switch test system in China.

Description

Technical field [0001] The invention belongs to the field of MEMS micromechanics and is a test system for MEMS inertial switches. It involves MEMS processing technology. Background technique [0002] In the process of national defense modernization, weapons are developing towards miniaturization and intelligence, which promotes the development of fuzes. In order to meet the demand for miniaturization of fuzes, based on the principle of capacitors, an inertial switch integrating sensor and actuator functions is proposed. Whether a capacitive switch is used as a sensor or an actuator, the corresponding test method and equipment have been proposed. However, there is no corresponding test method and equipment for the integrated inertial switch. In order to promote the modernization of national defense and the mass production of the industry, the test system was first proposed. Summary of the invention [0003] The invention is a test system designed for a MEMS inertial switch with...

Claims

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Application Information

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IPC IPC(8): G01R31/327
CPCG01R31/327
Inventor 刘双杰郝永平邓炬峰
Owner SHENYANG LIGONG UNIV
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