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139 results about "Capacitive switch" patented technology

A capacitive switch is a type of touch-controlled electrical switch that operates by measuring change in capacitance. It works in the same manner as a typical capacitive smartphone: when you touch the surface — assuming you aren’t wearing gloves — a small electrical charge is transferred...

Method of fabricating micro-electromechanical switches on cmos compatible substrates

A method of fabricating micro-electromechanical switches (MEMS) integrated with conventional semiconductor interconnect levels, using compatible processes and materials is described. The method is based upon fabricating a capacitive switch that is easily modified to produce various configurations for contact switching and any number of metal-dielectric-metal switches. The process starts with a copper damascene interconnect layer, made of metal conductors inlaid in a dielectric. All or portions of the copper interconnects are recessed to a degree sufficient to provide a capacitive air gap when the switch is in the closed state, as well as provide space for a protective layer of, e.g., Ta/TaN. The metal structures defined within the area specified for the switch act as actuator electrodes to pull down the movable beam and provide one or more paths for the switched signal to traverse. The advantage of an air gap is that air is not subject to charge storage or trapping that can cause reliability and voltage drift problems. Instead of recessing the electrodes to provide a gap, one may just add dielectric on or around the electrode. The next layer is another dielectric layer which is deposited to the desired thickness of the gap formed between the lower electrodes and the moveable beam that forms the switching device. Vias are fabricated through this dielectric to provide connections between the metal interconnect layer and the next metal layer which will also contain the switchable beam. The via layer is then patterned and etched to provide a cavity area which contains the lower activation electrodes as well as the signal paths. The cavity is then back-filled with a sacrificial release material. This release material is then planarized with the top of the dielectric, thereby providing a planar surface upon which the beam layer is constructed.
Owner:格芯公司

MEMS capacitive switch

The invention belongs to the technical field of electronic science, and relates to an MEMS capacitive switch. The MEMS capacitive switch comprises a substrate with an insulation layer, a signal transmission line and ground electrodes on the two sides, a dielectric layer is arranged on the surface of the signal transmission line, three metal coverage areas are arranged on the surface of the dielectric layer, the two ground electrodes are respectively provided with a fixed anchor point, and the two fixed anchor points support a drive electrode structure. The drive electrode structure is of a two-wing type phase step structure, and comprises a first drive electrode in the middle, a second drive electrode and a third electrode, the second drive electrode and the third electrode are arranged on the two wings, the two sides of the first drive electrode are connected with the fixed anchor points through clamped beams, the second drive electrode and the third drive electrode are connected with the first drive electrode through cantilever beams, and the distance between the second drive electrode and the third drive electrode and the signal transmission line is larger than the distance between the first drive electrode and the signal transmission line. The areas of the three drive electrodes are increased in sequence. Three work frequency bands can be achieved, and the MEMS capacitive switch has the advantages of being low in insertion loss, high in isolation degree and low in drop-down voltage and can be applied to a radio-frequency or microwave communication system.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

A segmented capacitive liquid level sensor and its liquid level measurement method

A segmented capacitive liquid level sensor and a liquid level measuring method thereof, comprising a microprocessor, a sine wave generating circuit connected with the microprocessor, and a multiplex switch connected with the microprocessor and the sine wave generating circuit, A segmented capacitor connected to the multi-way switch, the segmented capacitor is composed of at least two mutually insulated capacitor arrangements, the multi-way switch is connected to each segment of the capacitor in the segmented capacitor respectively, and the microprocessor A leakage resistance detection circuit and a phase difference detection circuit are respectively connected between the multi-way switch and the multi-way switch; the microprocessor controls the multi-way switch to connect the input terminals of each segment capacitor in the segmented capacitor to the sine wave through a charging resistor The generating circuit is connected to the leakage resistance detection circuit and the phase difference detection circuit respectively at the output end. The invention adopts a leakage resistance detection circuit and a phase difference detection circuit to accurately measure the capacitance of each segment of the segmented capacitor, so that the liquid level measurement is more accurate, the reliability is high, and the anti-interference ability is strong.
Owner:JIAXING UNIV
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