Micro nano step standard template and tracking method thereof

Abstract

The invention discloses a micro nano step standard template and a tracking method thereof. The micro nano step standard template is characterized by comprising an A working area and a B tracking area, wherein the A working area is internally provided with a nanoscale step, four calibration positioning blocks and four tracking reference positioning blocks. Through a design unit identifier and a template type identifier arranged under match of two pairs of mutually-symmetrical isosceles triangle-shaped tracking identifiers in the B tracking area, the putting direction and the specific position of the micro nano step standard template are determined; quick calibration and positioning in the longitudinal direction in the A working area is carried out through the four calibration positioning blocks in the A working area, quick positioning in the transverse direction in the A working area is carried out through the four tracking reference positioning blocks in the A working area, the initial measurement position is determined through the gap between each two tracking reference positioning blocks, the whole calibration process is completed, quick and efficient positioning and calibration are realized, and the repeatability is good.

Description

technical field [0001] The invention relates to a standard sample plate for precision measurement, in particular to a micro-nano step standard sample plate and a tracking method thereof, which are used for calibrating the measurement accuracy of a nanometer measuring instrument. Background technique [0002] In recent years, the semiconductor industry, precision engineering industry, microsystem technology (MEMS) and nanomaterial science have developed rapidly, resulting in an increasingly urgent need for high-precision and accurate quantitative measurement of micro-nanostructures. The size of micro-nano structures ranges from nanometers to hundreds of micrometers. To meet these demands, advanced microscopy techniques such as Scanning Probe Microscope (SPM) and Scanning Electron Microscope (SEM) have been well developed, but in order to ensure the reliability of dimensional measurement, routine instrument calibration work needs to pass A large number of micro and nano stand...

AI Technical Summary

Problems solved by technology

However, when the experimenters carry out related experiments, there are often some problems that make the calibration work cumbersome: First, due to the limitation of the preparation process, the size and structure of the sample are often too single, and the key features are relatively simple, which is not conducive to the experimenters in the initial measurement. Accurate and fast positioning of the tested structure area

Second, some nano measuring instruments have low CCD resolution when the magnification is large, making the field of view small and blurred, which is not conducive to observing the tracking mark pattern and determining the initial position of the measurement

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