Manufacturing method of temperature self compensation type fiber EFPI ultrasonic sensor
A manufacturing method and sensor technology, applied in the direction of measuring ultrasonic/sonic/infrasonic waves, instruments, using wave/particle radiation, etc., can solve the problems of insufficient positioning accuracy of F-P cavity length, low reliability, and poor consistency of temperature characteristics, etc., to achieve Improve the first-time success rate and performance consistency, improve accuracy and use reliability, improve reliability and service life
Inactive Publication Date: 2017-07-18
杨志强
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Problems solved by technology
[0004] The existing optical fiber EFPI sensor manufacturing method is insufficient for the positioning accuracy of the F-P cavity length, and due to the influence of welding stress and strain, the optical fiber EFPI sensor produced is not suitable for the monitoring of high-frequency and fast ultrasonic signals. Most of the sensor manufacturing methods use a single method to package the F-P cavity, which has low reliability, a low success rate for batch production, no temperature compensation and poor consistency of temperature characteristics
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[0025] The structure and the manufacturing method of the temperature self-compensating type optical fiber EFPI ultrasonic sensor involved in the present invention will be further elaborated below with specific embodiments:
[0026] see Figure 1 to Figure 3 As shown, a fiber optic EFPI ultrasonic sensor 30 is provided in this embodiment, including a sensor head unit 20 and a sensor body unit, the sensor body unit includes a sensor sheath 9, and the sensor head unit 20 is arranged on the sensor sheath 9 Inside, the sensor head unit 20 includes a capillary 3 and a part of the optical fiber 1 arranged in the capillary 3 and a ferrule bracket 2 for fixing the optical fiber 1, and a film for sensing ultrasonic vibration is also arranged on one end of the capillary 3 sheet 4, the inner surface 13 of the diaphragm 4, the front end face 12 of the optical fiber 1 and the inner surface of the capillary 3 jointly define a Fabry-Perot cavity 11, and the front end face 12 of the optical fi...
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The invention discloses a manufacturing method of a temperature self compensation type fiber EFPI (extrinsic Fabry-Perot interferometer) ultrasonic sensor. The manufacturing method of a temperature self compensation type fiber EFPI ultrasonic sensor mainly includes manufacturing of a sensor head unit and assembling of a sensor, and includes the following concrete steps: welding a diaphragm to the end portion of a capillary; fixing a fiber in a pull-over support; putting the fiber and the pull-over support into the capillary from the other end of the capillary, and then welding and fixing the pull-over support and the capillary to enable the inner surface of the diaphragm, the front end surface of the fiber and the inner surface of the capillary to form a Fabry-Perot cavity through common defining; and assembling the manufactured sensor head unit in a sensor body unit and packaging and fixing the manufactured sensor head unit. The manufacturing method of a temperature self compensation type fiber EFPI ultrasonic sensor improves the one-time success rate and the performance consistency for batch production of sensors, improves reliability and service life of the sensors, realizes accurate positioning of the length of the F-P cavity and accurate fixed point welding, and can guarantee high sensitivity and measuring accuracy of ultrasonic signals..
Description
technical field [0001] The invention relates to the technical field of optical fiber ultrasonic sensors, in particular to a method for manufacturing a temperature self-compensating optical fiber EFPI (extrinsic Fabry-Perot interferometer, external cavity Fabry-Perot interferometer) ultrasonic sensor. Background technique [0002] At present, there are many methods for ultrasonic signal monitoring of industrial equipment at home and abroad. The piezoelectric ultrasonic detection method is the most popular method, but the sensor is attached to the equipment shell, and the ultrasonic signal inside the detection equipment is not easily disturbed by electromagnetic noise. , but the sensitivity is not high. There are also piezoelectric sensors placed inside the equipment casing to detect ultrasonic signals in liquids, but since piezoelectric ultrasonic sensors have low detection sensitivity in liquids, they cannot be placed in strong electric fields or at places with high voltage....
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IPC IPC(8): G01H9/00
CPCG01H9/004
Inventor 杨志强王伟郭晨华
Owner 杨志强