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Vapor plating device

A technology of evaporation and evaporation source, which is applied in the field of organic light-emitting display, can solve the problem of low yield rate of the substrate to be evaporated, and achieve the effect of firm positioning

Active Publication Date: 2017-07-18
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on this, it is necessary to solve the problem that the above-mentioned mask plate sags to a certain extent relative to the substrate to be evaporated due to its own weight, thereby causing the evaporation device to have a low yield rate of the substrate to be evaporated. Evaporation device for positioning

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Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0025] It should be noted that when an element is referred to as being “disposed on” another element, it may be directly on the other element or there may also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of illustration only and are not intended to represent the only embodiments.

[0026] Unless otherwise defined, all technical and scientific ter...

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Abstract

The invention relates to a vapor plating device used for preparing an OLED device; the vapor plating device comprises the following units: a vapor plating chamber; a vapor plating source arranged in the vapor plating chamber and used for vapor plating the surface of a to-be-vapor plated substrate; a magnetic fixed plate arranged right opposite to the vapor plating source and having a first surface in a convex surface; a mask plate magnetically attached to the first surface of the magnetic fixed plate and matched to the magnetic fixed plate, and used for clamping the to-be-vapor plated substrate between the mask plate and the magnetic fixed plate. The magnetic fixed plate of the vapor plating device has the first surface in the convex surface structure, thus firmly attaching the mask plate onto the surface, and further clamping the flexible material substrate between the magnetic fixed plate and the mask plate; the first surface is in the convex structure, thus preventing the portion, close to the center, of the mask plate from sagging under self gravity.

Description

technical field [0001] The invention relates to the field of organic light-emitting displays, in particular to an evaporation device. Background technique [0002] Organic Light Emitting Diode (OLED) is an organic thin-film electroluminescent device, which has the advantages of easy formation of flexible structure and wide viewing angle; therefore, the display technology using OLED has become an important display technology. technology. [0003] The full-color display of OLED generally includes R (red) G (green) B (blue) sub-pixels to emit light independently, or a white light OLED combined with a color filter film. Among them, the independent light emission of RGB sub-pixels is currently the most widely used color mode, which utilizes the organic light-emitting materials in the sub-pixel units to emit light independently. [0004] At present, the organic luminescent material layer is generally formed by vacuum evaporation on the surface of the substrate to be evaporated. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56C23C14/24C23C14/12C23C14/56C23C14/04
CPCC23C14/0021C23C14/042C23C14/12C23C14/24C23C14/56H10K71/164H10K71/166
Inventor 李鹏
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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