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Stepping attracting static locking micromechanical inertia switch

An inertial switch and micro-mechanical technology, applied in the direction of electric switches, electrostatic relays/electro-adhesion relays, circuits, etc., can solve problems such as inability to reset and fail to meet the precision requirements of inertial switches, so as to realize the locking function, reduce the impact, and improve The effect of stability

Active Publication Date: 2017-07-21
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Similarly, the device needs a certain overload acceleration in the application process to ensure the closing and locking between the moving electrode and the fixed electrode. Therefore, the improved design cannot meet the accuracy requirements of the inertial switch with a lower threshold. Problems that cannot be reset after

Method used

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  • Stepping attracting static locking micromechanical inertia switch
  • Stepping attracting static locking micromechanical inertia switch
  • Stepping attracting static locking micromechanical inertia switch

Examples

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Embodiment Construction

[0052] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0053] This embodiment is based on the surface micromachining process, and is produced by conducting multiple non-interfering laminated electroplating methods for the entire switch structure on an insulating substrate such as quartz or glass at room temperature. When an external acceleration exceeding the threshold value of the device is applied in the sensitive direction of the device, the sensitive mass connected to the conjoined serpentine spring will move towards the fixed electrode under the a...

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Abstract

The invention provides a stepping attracting static locking micromechanical inertia switch. Array fixed electrodes are distributed in an array manner and are formed by layout line connection, the array fixed electrodes are insulated from an attracting electrode through air gaps and are arranged on an insulating substrate, a flexible connection multi-plane movable electrode is connected with a conjoined serpentine spring and forms a hanging movable structure by means of a spring fixed bearer, and a reverse spacing and blocking structure is hung above the flexible connection multi-plane movable electrode. According to the invention, by arranging the array-type layout in a plane, the contact possibility of the fixed electrodes and the flexible connection multi-plane movable electrode is greatly increased; by means of the static attracting effect of the attracting electrode and the flexible connection multi-plane movable electrode, the contact time between the fixed electrodes and the flexible connection multi-plane movable electrode can be prolonged at will, and the contact performance is improved; large-amplitude transformation of the flexible connection multi-plane movable electrode in the non-sensitive direction can be effectively suppressed by means of the reverse spacing and blocking structure, and the device stability is improved.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electromechanical systems, in particular to an electrostatic locking vertically sensitive micro-mechanical inertia switch with a step-by-step attraction. Background technique [0002] MEMS inertial switch is a passive device that integrates the functions of sensors and actuators. It has the characteristics of small size, high integration, and no energy consumption. The MEMS inertial switch based on the surface micromachining process has the characteristics of low manufacturing cost and good threshold consistency, and has become the mainstream of inertial switch production. Traditionally reported MEMS inertial switches, when the sensitive direction is subjected to an external acceleration exceeding the threshold, the mobile electrode moves towards the fixed electrode and undergoes a rigid collision. The contact time is extremely short, which increases the difficulty of the signal processi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01H59/00H01H35/14
CPCH01H35/142H01H59/0009
Inventor 李健王艳杨卓青丁桂甫
Owner SHANGHAI JIAO TONG UNIV
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