Gas transmission apparatus for hydride vapor phase epitaxy (HVPE), reaction chamber and HVPE device
A gas transmission and reaction chamber technology, applied in the direction of chemical reactive gas, crystal growth, gaseous chemical plating, etc., can solve the problem of poor uniformity of epitaxial layer thickness components, and achieve the effect of ensuring uniformity and improving uniformity.
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[0042] The implementation of the present invention will be illustrated by specific specific examples below, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.
[0043] see Figure 1 to Figure 2 , The first embodiment of the present invention relates to a gas delivery device for HVPE. It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implementation of the present invention. Limiting conditions, so there is no technical substantive meaning, any modification of structure, change of proportional relationship or adjustment of size, without affecting the effect and purpose of the present invention, should still fall within the scope of the present...
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