High-sensitivity optical fiber micro cantilever sensor for detecting acceleration and machining method

A micro-cantilever and acceleration technology, applied in the field of sensors, can solve the problems of low sensor integration and achieve the effects of small temperature dependence, light volume and fast speed

Inactive Publication Date: 2017-08-04
李俊
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0009] The purpose of the present invention is to provide a highly sensitive optical fiber micro-cantilever beam sensor and a processing method for detecting acceleration. The miniaturized accelerometer is prepa

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  • High-sensitivity optical fiber micro cantilever sensor for detecting acceleration and machining method
  • High-sensitivity optical fiber micro cantilever sensor for detecting acceleration and machining method
  • High-sensitivity optical fiber micro cantilever sensor for detecting acceleration and machining method

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Embodiment Construction

[0038]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0039] In describing the present invention, it is to be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "surrounding" etc. Indicating orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in ...

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Abstract

The invention discloses a high-sensitivity optical fiber micro cantilever sensor for detecting acceleration. The sensor comprises an optical fiber, and one end face of the optical fiber is equipped with a mirror. A Fabry-Perot cavity is arranged in a coating layer of the optical fiber. The coating layer of the optical fiber is machined and etched with picoseconds laser pulse to get an optical fiber micro cantilever and an acceleration sensitive mass block. An optical fiber micro cantilever is arranged at one side of the Fabry-Perot cavity. An acceleration sensitive mass block is formed on a surface of the optical fiber micro cantilever. The acceleration sensitive mass block and the mirror constitute an interferometric optical fiber sensor. By using one communication optical fiber to integrate sensing and transmission, acceleration signal detection and transmission are realized, and remote real-time monitoring is realized. The sensor is small and light, and is suitable for acceleration monitoring in a limited space environment. The optical fiber cantilever is manufactured using the laser machining technology, manufacturing is quick and can be carried out on a large scale, and the manufacturing cost can be reduced.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a high-sensitivity optical fiber micro-cantilever sensor and a processing method for detecting acceleration, which are used for real-time monitoring requirements of acceleration signals in fields such as industrial production, military affairs, and public safety. Background technique [0002] Acceleration sensor is a commonly used type of sensor that uses the inertial properties of objects to measure the movement of objects. It is widely used in earthquakes, bridge health status, industrial machinery and equipment safety monitoring and other fields. Output a signal that is proportional to or has a certain relationship with the motion acceleration of the carrier. Its sensing principle is based on the second theorem of Newtonian mechanics: an object will generate acceleration under the action of an external force, and its magnitude is proportional to the applied externa...

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Application Information

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IPC IPC(8): G01P15/03
CPCG01P15/03
Inventor 李俊李明叡
Owner 李俊
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