Fuel cell metal polar plate vacuum coating flow-line equipment and coating method thereof

A metal plate and fuel cell technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of small furnace loading, single exhaust system, low production efficiency, etc.

Active Publication Date: 2017-08-18
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The main problems are low production efficiency and low yield
This is due to the fact that the current circular cavity has a small furnace capacity, a large cavity volume, and a single exhaust system.

Method used

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  • Fuel cell metal polar plate vacuum coating flow-line equipment and coating method thereof
  • Fuel cell metal polar plate vacuum coating flow-line equipment and coating method thereof
  • Fuel cell metal polar plate vacuum coating flow-line equipment and coating method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0087] The second coating room is equipped with three pairs of graphite targets. Along the direction of the turret, the cathode of the first pair of graphite targets is a closed field unbalanced field magnetron target, a rectangular planar magnetron target, followed by an ion source, and the second pair of graphite targets. The target is a graphite target with a balanced magnetic field rectangular planar magnetron target, and the third pair of graphite targets is a closed-field unbalanced magnetron target, and the unbalanced methods are all relative to the target structure. This layout method is based on the following considerations:

[0088] There are certain differences in the films prepared by sputtering with balanced magnetron sputtering targets and sputtering with unbalanced magnetron sputtering targets. This arrangement can form a hard-soft-hard coating system alternately. It is beneficial to avoid the failure phenomenon of the anti-corrosion conductive coating due to ex...

Embodiment 2

[0099] The second coating room is equipped with three pairs of graphite targets. Along the direction of the turret, the cathode of the first pair of graphite targets is a closed-field unbalanced field rectangular planar magnetron graphite target, followed by an ion source, and the second pair of graphite targets is a balanced Magnetic field rectangular planar magnetron target graphite target, followed by the third pair of targets is balanced magnetic field rectangular planar magnetron target niobium target, the fourth pair of targets is unbalanced field rectangular planar magnetron target rectangular planar magnetron graphite target. This target layout method is based on the following considerations:

[0100] Doping Nb in the amorphous carbon coating is beneficial to improve the corrosion resistance of the metal plate of the fuel cell. In addition, the doping of Nb can also avoid the increase of the contact resistance of the amorphous carbon coating during service.

[0101] Un...

Embodiment 3

[0111] The second coating chamber is equipped with three pairs of Au targets, and the cathodes of the three pairs of Au targets are all closed-field unbalanced-field rectangular planar magnetron targets. An Au recovery device is arranged on the wall of the second coating chamber. Considering the characteristics of this process, the ion source device was not used.

[0112] Under the premise of this target layout pattern, the process preparation method is as follows:

[0113] 1) Preparatory work, including stamping metal plates, single plate welding, cleaning and other steps. The cleaning process of the metal plate is alkali washing-deionized water ultrasonic cleaning-acid washing-deionized water ultrasonic cleaning-deionized water ultrasonic cleaning-alcohol ultrasonic-drying;

[0114] 2) Furnace loading in the furnace chamber. In order to ensure the vacuum degree of the furnace chamber, the furnace loading method adopted in the present invention is as follows: in the clean r...

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PUM

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Abstract

The invention relates to fuel cell metal polar plate vacuum coating flow-line equipment and a coating method thereof. The flow-line equipment comprises a vacuum cavity set, a support, a transmission mechanism and a PLC control system, wherein the vacuum cavity set comprises a furnace-entering cavity, a front processing cavity, a first coating cavity, a second coating cavity, a back processing cavity and a furnace-outing cavity which are sequentially connected in a sealed mode and mutually independent, a heating device and an ion source device are arranged in the front processing cavity, the first coating cavity is used for depositing an element layer of a bottom layer for the fuel cell metal polar plate, the second coating cavity is used for depositing a corrosion resistant conductive coating for the fuel cell metal polar plate, and an independent vacuum pump is arranged in each cavity; the support is used for arranging the to-be-handled fuel cell metal polar plate; and the transmission mechanism comprises a flow-line guide rail which sequentially penetrates through the cavities in the vacuum cavity set and a power assembly driving the support to move along the flow-line guide rail. Compared with the prior art, the flow-line equipment is extractive and simple in structure, convenient to install, reliable in maintenance, high in production efficiency and the like.

Description

technical field [0001] The invention relates to the field of surface modification of fuel cell metal pole plates, in particular to a fuel cell metal pole plate vacuum coating assembly line equipment and a coating method thereof. Background technique [0002] Vacuum coating refers to the deposition of a certain metal or metal compound on the surface of a material in the form of gas in a vacuum environment, which belongs to the physical vapor deposition process. Vacuum coating technology can be traced back to the 1930s, it was applied to industrial production in the 1940s, and industrial mass production began to appear in the 1980s. Vacuum coating technology has a wide range of applications, including electronics, packaging, aerospace, cutting tools, optics, decoration and other fields. [0003] Proton Exchange Membrane Fuel Cell (PEMFC) can directly convert the chemical energy in hydrogen into electrical energy without combustion, and its energy conversion efficiency is not ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/35
Inventor 易培云张伟鑫毕飞飞彭林法来新民
Owner SHANGHAI JIAO TONG UNIV
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