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Preparation equipment for large-area perovskite thin film

A perovskite, large-area technology, applied in the field of solar cells, can solve the problem that perovskite solar cells cannot be prepared in a large area, and achieve the effect of improving the uniformity of large-area deposition

Inactive Publication Date: 2017-08-18
CHANGZHOU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is: to overcome the deficiencies of the prior art, to provide a large-area perovskite film preparation equipment, and to solve the defect that perovskite solar cells cannot be prepared in a large area

Method used

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  • Preparation equipment for large-area perovskite thin film
  • Preparation equipment for large-area perovskite thin film

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Such as figure 1 As shown, a large-area perovskite film preparation equipment includes a vacuum chamber 1, which is a cavity in a vacuum box, and a substrate heater 2 for placing a substrate is arranged in the vacuum chamber 1. Substrates, such as: glass, PET film, PI film, stainless steel sheet, etc. are clamped on the substrate heater and deposited upward. Or install rollers under the substrate heater, and the substrate moves slowly on the rollers to form a chain deposition device.

[0029] The vacuum chamber 1 below the substrate heater 2 is provided with a first evaporation shell 3 and a second evaporation shell 4, the upper end of the first evaporation shell 3 is open, and the upper end of the second evaporation shell 4 is vertically provided with a plurality of Gas pipe 42, the first evaporator shell 3 is nested in the upper end of the second evaporator shell 4, and the upper end of each air pipe 42 passes through the bottom surface of the first evaporator shell ...

Embodiment 2

[0042] Such as figure 2As shown, a large-area perovskite film preparation equipment includes a vacuum chamber 1, which is a cavity in a vacuum box, and a substrate heater 2 for placing a substrate is arranged in the vacuum chamber 1. Substrates, such as: glass, PET film, PI film, stainless steel sheet, etc., can be clamped on the substrate heater and deposited upward during installation; or, a roller is installed under the substrate heater, and the substrate is slowly rolled on the roller The movement forms a chain deposition equipment.

[0043] The vacuum chamber 1 below the substrate heater 2 is provided with a first evaporation shell 3 and a second evaporation shell 4, the upper end of the first evaporation shell 3 is open, and the upper end of the second evaporation shell 4 is vertically provided with a plurality of Gas pipe 42, the first evaporator shell 3 is nested in the upper end of the second evaporator shell 4, and the upper end of each air pipe 42 passes through t...

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Abstract

The invention relates to preparation equipment for a large-area perovskite thin film. The preparation equipment comprises a vacuum cavity. A substrate heater used for placing a substrate is arranged in the vacuum cavity. A first evaporation shell and a second evaporation shell are arranged in the vacuum cavity and located below the substrate heater. The first evaporation shell is nested into the upper end of the second evaporation shell. A baffle is arranged between a first evaporator and the substrate heater. First heaters are arranged at the bottom of the first evaporation shell. The first evaporation shell is connected with a first gas carrying channel, and the first gas carrying channel communicates with an external gas carrying source. A second heater is arranged at the bottom of the second evaporation shell. The second evaporation shell is connected with a second gas carrying channel, and the second gas carrying channel communicates with an external gas carrying source. According to the preparation equipment for the large-area perovskite thin film, reactive species can be sprayed onto the substrate through a sprayer by means of gas carrying, the perovskite thin film is formed by means of reacting, and the large-area deposition uniformity of the perovskite thin film is greatly improved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a preparation device for a large-area perovskite thin film. Background technique [0002] As the next generation of high-efficiency thin-film solar cells, perovskite thin-film solar cells are developing very rapidly. In 2012, the first solid-state perovskite solar cells were published with an efficiency of 9.7%. Within 5 years, small-area perovskite thin-film solar cells The battery efficiency reaches 21%. At present, some industrialized methods to replace spin coating have been developed, such as thermal spraying, thermal evaporation, CVD and so on. However, these high-efficiency batteries are prepared by the spin coating method, which cannot be industrialized on a large scale. Contents of the invention [0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, provide a large-area perovskite film preparation equ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/448C23C16/455C23C16/40H10K99/00
CPCC23C16/409C23C16/4481C23C16/455H10K30/50C23C14/228C23C14/243C23C16/30C23C16/45563Y02E10/542Y02E10/549H10K71/164H10K85/50H01G9/2009H01G9/0036H10K30/30
Inventor 丁建宁王书博袁宁一贾旭光
Owner CHANGZHOU UNIV