A preparation method of high-precision and extremely small-sized self-supporting beryllium thin film

Abstract

The invention discloses a preparing method of a high-precision self-supporting beryllium film with the minimum size. The preparing method sequentially comprises the following steps that a high-precision step is machined on the surface of a copper block body; the roughness of the end face of the copper step is meticulously grinded to the nanometer magnitude level; an aluminum film is evaporated and deposited on the end face of the copper step; the beryllium film is deposited on the surface of the aluminum film; a NaOH solution reaction is adopted for removing a substrate of the aluminum film, and the high-precision self-supporting beryllium film with the minimum size is obtained. The method greatly improves the size precision of the high-precision self-supporting beryllium film with the minimum size, and precision can reach 1 micrometers. Moreover, the obtained self-supporting beryllium film is smooth in surface, free of sand holes, regular in shape and excellent in quality.

Description

technical field [0001] The invention relates to the technical field of self-supporting beryllium thin films, more specifically, the invention relates to a preparation method of high-precision and extremely small-sized self-supporting beryllium thin films. Background technique [0002] Beryllium (Be) is one of the rare metals. Compared with other low-sequence metal materials, it has low density, high melting point, high strength and elastic modulus, large specific heat capacity, high X-ray transmittance, and adjustable thermal neutron scattering. And other characteristics, its unique physical and chemical properties make it have important application value in the nuclear industry, aerospace, metallurgical industry and high-tech fields. [0003] A self-supporting beryllium film refers to a beryllium film that exists independently without substrate support. The "high-precision and extremely small-sized self-supporting beryllium film" of the present invention, unless otherwise s...

AI Technical Summary

Problems solved by technology

High-precision and extremely small-sized self-supporting beryllium films are often used as state equation targets in laser physics experiments, X-ray filters on some precision instruments, etc. The target or filter has extremely high requirements for the dimension accuracy of self-supporting beryllium films. Conventional self-supporting film preparation methods cannot meet the requirements

[0004] At present, the preparation method of large-scale self-supporting beryllium film has been reported. Generally, a mask of a certain size is used as the shape of the self-supporting beryllium film. The dimensional accuracy of the mask is generally not high. effect, which eventually leads to a difference between the size of the self-supporting beryllium film and the size of the mask. This method is less applicable to the preparation of high-precision and extremely small self-supporting beryllium films

Images