High-frequency solenoid valve group-based high-precision air pressure control system and method

Abstract

The present invention discloses a high-frequency solenoid valve group-based high-precision air pressure control system and method. The control system includes a gas source, a filter, an oil mist separator, a precision pressure reducing valve, a buffer airtight gas chamber, gas incoming high-frequency solenoid valve groups, an airtight gas chamber and gas exhausting high-frequency solenoid valve groups, wherein the gas source, the filter, the oil mist separator, the precision pressure reducing valve, the buffer airtight gas chamber, the gas incoming high-frequency solenoid valve groups, the airtight gas chamber and the gas exhausting high-frequency solenoid valve groups are connected with one another sequentially; a control CPU and an AD converter acquire air pressure in the airtight gas chamber in real time; the difference of an air pressure set value and an air pressure actual measurement value is obtained, so that error signals can be obtained, a sectional control algorithm is executed according to the error signals, and an output control quantity can be obtained; and the gas incoming high-frequency solenoid valve groups and the gas exhausting high-frequency solenoid valve groups are controlled according to the different stages of errors. The high-frequency solenoid valve group-based high-precision air pressure control system and method of the invention have the advantages of low price, excellent economical performance, small size, greater easiness in installation at center conditions compared with proportional valves and servo valves.

Description

technical field [0001] The invention relates to air pressure control technology, in particular to a control system and method based on a high-frequency electromagnetic valve group. Background technique [0002] The advantages of no pollution, low cost, simple structure, low pressure level, good safety, and fast response speed make pneumatic technology widely used. [0003] Due to the strong compressibility of air, the working medium of pneumatic technology, the non-linearity of the gas flowing out of the valve port, and the influence of friction between the piston and the cylinder, the pneumatic system has strong nonlinearity and low stiffness, making the stability of the pneumatic system relatively low. Therefore, the control accuracy of air pressure is generally not high. Generally, limiting air pressure fluctuations within 100 Pa can be considered as high-precision air pressure control. In applications such as ultra-precision parts processing, high-precision pressure ga...

AI Technical Summary

Problems solved by technology

Therefore, it is difficult to realize the air pressure fluctuation below 50Pa by using the proportional valve.

The control of the pressure of the closed air chamber can also be composed of a system based on the on-off valve. Usually, the control method of independent action of the intake and exhaust is adopted. This method is simple and flexible, and the response speed is fast. Control accuracy is low

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