A MEMS Acceleration Sensor Based on Heat Convection Principle
An acceleration sensor and micro-mechanical technology, applied in the direction of measuring acceleration, velocity/acceleration/impact measurement, acceleration measurement using inertial force, etc., can solve problems such as large sensitivity coefficient, large temperature drift of acceleration sensor, and use temperature limit
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[0038] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the present invention is by no means limited to the described embodiments.
[0039] Embodiments of the present invention relate to a thermal convection micromachined acceleration sensor, such as figure 1 As shown, a layer of polyimide film is made on the polished surface of the first substrate, the polyimide film is etched to form a groove in the reference area, and aluminum oxide is regrown to form an alumina reference area. The surface of this reference area is different from other The surface of the polyimide area is on the same plane; the main active part is composed of a heating resistor and a sensing resistor, both of which are made on the polyimide film, and the length, width, thickness and shape of the two sensing resistors are the same, Symmetrically placed on both sides of the heating resistor, the distance to the heating resistor is equal; ...
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