A kind of terahertz filter and its processing method
A filter and terahertz technology, applied in the field of terahertz filters and their processing, can solve the problems of brittle core material and easy damage of terahertz filters, so as to improve strength, increase service life, ensure accuracy and surface The effect of flatness
Active Publication Date: 2019-04-26
NO 54 INST OF CHINA ELECTRONICS SCI & TECH GRP
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[0004] The terahertz filter in the prior art mainly includes two parts, the core and the package shell, but the material of the core is relatively brittle, which makes the terahertz filter in the prior art extremely prone to damage
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[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0044] Such as Figure 1~3 As shown, a terahertz filter includes a core 2 and a packaging shell 1, the minimum structural size of the core 2 is on the order of 10 microns, and the core 2 is processed based on MEMS and deep reactive ion etching technology. The formed waveguide cavity 21 has a diaphragm 22 in the waveguide cavity 21, and a core body cavity (not shown in the figure, namely figure 1 The position occupied by the core body 2), the core body cavity has cavity walls in all directions, the core body is located in the core body cavity, the packaging shell 1 completely wraps the core body 2, and a linear guide is provided at both ends of the core body cavity Hole 11, one end of the guide hole 11 is connected to the...
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The invention discloses a terahertz filter, belonging to the technical field of filters. The filter comprises a core body and a packaging shell, wherein the core body is provided with a rectangular waveguide cavity filter structure processed by the micro-electro-mechanical system and deep reactive ion etching technology, a core cavity of which the size is consistent with the outer size of the core body is arranged in the packaging shell, the packaging shell completely wraps the core body, and each of two ends of the core cavity is provided with a straight guide hole, one end of the guide hole is connected with a waveguide cavity of the core body, the other open end of the guide hole is arranged on the outer surface of the packaging shell, the guide hole and the waveguide cavity are in a straight line, and the radial cross section of the guide hole is consistent with the radial cross section size of the waveguide cavity. The terahertz filter provided by the invention can guarantee the filtering performance and also has excellent strength, and is an important improvement on the prior art.
Description
technical field [0001] The invention relates to the technical field of filters, in particular to a terahertz filter and a processing method thereof. Background technique [0002] Terahertz wave is a kind of "light" energy, which refers to electromagnetic waves with a wavelength between 3 μm and 1000 μm and a frequency of 0.1-10 THz, between microwaves and infrared rays. The unique properties of terahertz (abbreviated as THz) waves make it widely used in astrophysics, materials science, biomedicine, environmental science, spectroscopy and imaging technology, information science and technology and other fields. At present, terahertz wave technology has been applied in many fields, and there are still infinite possibilities in the future. [0003] As an important functional device in electronic systems, terahertz wave filters are widely used in terahertz communication systems and terahertz detection systems. In the practical application of terahertz waves, since most of the a...
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IPC IPC(8): H01P1/207H01P11/00
CPCH01P1/207H01P11/007
Inventor 张乃柏宋瑞良郭秋泉杨军汪春霆
Owner NO 54 INST OF CHINA ELECTRONICS SCI & TECH GRP