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A kind of preparation equipment of conductive thin film

A conductive film and equipment technology, applied in the field of conductive film preparation equipment, can solve problems such as film deformation, and achieve the effect of eliminating adverse effects

Active Publication Date: 2019-01-01
ZHEJIANG SHANGCHENG SCI&TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a kind of preparation equipment of conductive thin film aiming at the above-mentioned problems existing in the existing technology. The technical problem to be solved by the present invention is how to prevent the film from being deformed during processing

Method used

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  • A kind of preparation equipment of conductive thin film
  • A kind of preparation equipment of conductive thin film
  • A kind of preparation equipment of conductive thin film

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Embodiment Construction

[0046] The following are specific embodiments of the present invention and in conjunction with the accompanying drawings, the technical solutions of the present invention are further described, but the present invention is not limited to these embodiments.

[0047] Such as figure 1 and figure 2 As shown, the preparation equipment includes a sputtering machine, and the sputtering machine includes a cylindrical housing 11, the two ends of the housing 11 have openings, and a hollow installation cylinder 12 is arranged in the housing 11, and a hollow installation cylinder 12 is arranged in the installation cylinder 12. There is a rotating shaft 13, which is connected with the output shaft of a motor. The rotating shaft 13 is a hollow structure. There is a ventilation chamber 14 in the rotating shaft 13. Several partitions 15 are uniformly arranged on the inner wall of the ventilation chamber 14. The outer ends of each partition 15 It is fixedly connected with the rotating shaft ...

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Abstract

The invention provides equipment for preparing a conductive film, belongs to the technical field of functional films, and solves the technical problem that a conductive film is easy to damage in a processing process. The equipment for preparing the conductive film includes a sputtering machine, the sputtering machine includes a cylindric housing, two ends of the housing have openings, a hollow installation cylinder is arranged in the housing, a rotating shaft is arranged in the installation cylinder, the rotating shaft is connected with an output shaft of a motor, the rotating shaft is of a hollow structure, the rotating shaft has a ventilation cavity, the inner wall of the ventilation cavity is uniformly provided with a plurality of separator plates, the outer end of each separator plate is fixedly connected with the rotating shaft, a gap exists between the inner ends of the adjacent separator plates, the installation cylinder is provided with a plurality of avoiding grooves I, the outer wall of the rotating shaft is uniformly provided with ventilation plates in one-to-one correspondence with the avoiding grooves, the inner ends of the ventilation plates are fixedly connected with the rotating shaft, and the outer ends of the ventilation plates are inserted in the corresponding avoiding grooves. The equipment for preparing the conductive film has the advantages of ingenious structure, good protection for the film and the like.

Description

technical field [0001] The invention belongs to the technical field of functional thin films, and relates to a preparation equipment for conductive thin films. Background technique [0002] Conductive film is widely used in flat panel display, screen touch technology, solar control, anti-fog glass, ice glass, anti-static coating and other fields. It is realized by attaching a transparent conductive layer on the ordinary film. The attached conductive layer It can be processed by sputtering, pulsed laser deposition and other means. [0003] In the prior art, the technology of processing conductive films by various means has the following problems: because the film is thin, it is squeezed by uneven external force or hard parts during the winding process and the process of processing, resulting in thin film Deformation, formation of uneven surfaces, damage, etc. Contents of the invention [0004] The object of the present invention is to provide a kind of preparation equipme...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B13/00C23C14/56C23C14/34
CPCC23C14/34C23C14/562H01B13/0026
Inventor 张伟忠苏跃锋施叶标汪琴伟
Owner ZHEJIANG SHANGCHENG SCI&TECH
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