Laser multi-dimension servo detection device and detection system thereof
A detection device, multi-dimensional technology, applied in the direction of measuring device, optical device, mechanical diameter measurement, etc., can solve the problem of low detection efficiency
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[0027] The present invention is described in further detail now in conjunction with accompanying drawing. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0028] The invention provides a laser multi-size servo detection device, comprising:
[0029] Laser displacement sensor 1, used to emit laser light to the detection position,
[0030] The rotary motion component is used to control the rotation of the laser displacement sensor 1 so that the laser exit surface 11 on the laser displacement sensor 1 can emit laser light in the X and Y directions,
[0031] The X-direction movement component, the rotation movement component is fixedly connected with the X-direction movement component, and the X-direction movement component is used to control the rotation movement component to be smooth in the X direction,
[0032]...
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