VOC adsorption equipment for on-line measurement of VOC concentration and method thereof

A technology of adsorption equipment and adsorbent, applied in the field of gas cleaning equipment, can solve the problems of large power consumption, large energy consumption, and increased factory costs

Pending Publication Date: 2017-11-21
AMEC WISETRON TECH SHANGHAI CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In order to heat the regeneration gas stream to the temperature at which the VOCs can be desorbed, the heating device usually provides a large energy consumption, and since t...

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  • VOC adsorption equipment for on-line measurement of VOC concentration and method thereof
  • VOC adsorption equipment for on-line measurement of VOC concentration and method thereof
  • VOC adsorption equipment for on-line measurement of VOC concentration and method thereof

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Embodiment Construction

[0053] The device and method of the present invention will be described below in conjunction with specific embodiments and accompanying drawings. It should be emphasized that the illustration here is only an example, and other implementations utilizing the present invention are not excluded.

[0054] figure 1 It is a structural schematic diagram of an embodiment of the VOC adsorption equipment of the present invention. The adsorption equipment can be applied in many fields, for example, it can be used to remove VOC gas generated in the production of photoresist coating equipment (equipment to be purified). When in use, the exhaust gas outlet of the equipment to be purified or the area can be connected to the adsorption equipment, and the gas to be purified generated during the operation of the equipment to be purified is continuously introduced into the adsorption equipment. The adsorption equipment can separate the VOC components in it, so that the purified gas can be recycle...

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Abstract

The invention provides a piece of VOC adsorption equipment for on-line measurement of VOC concentration and a method thereof. In one embodiment, real time measurement of VOC concentration parameters can be carried out, optimized power shifts of a heating device, a regeneration blower fan, a treatment blower fan and the like are selected, VOC removing effects are guaranteed, and energy is greatly saved. In another embodiment, the heating device comprises at least two heating phases, one heating phase provides a lower temperature, so that VOC components of lower boiling points are released by an adsorbent; and the other heating phase provides a higher temperature, so that the VOC components of higher boiling points can be released by the adsorbent. Different phases which are alternatively carried out guarantee removal effects of VOC and greatly save energy.

Description

technical field [0001] The invention relates to gas cleaning equipment and methods, in particular to a technology for cleaning volatile organic gases during processing, which can greatly save energy consumption while maintaining high-efficiency gas purification. Background technique [0002] In coating factories, semiconductor factories, or printing factories, etc., a large amount of organic solvents are used, and organic solvents tend to volatilize gaseous volatile organic compounds (Volatile Organic Compounds, VOC for short) into the air. As we all know, the VOC discharged from the factory into the atmosphere reacts with sunlight, ozone, etc. to form harmful organic particles, and increases the concentration of ozone in the atmosphere, which has a very bad impact on the atmospheric environment. At the same time, it also It will have adverse effects on the health of workers exposed to VOCs in the factory. Therefore, the VOC produced in industrial production must be treated...

Claims

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Application Information

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IPC IPC(8): B01D53/06
CPCB01D53/06B01D2259/4009B01D2257/708Y02A50/20
Inventor 刘汝春张任戎周品良罗力
Owner AMEC WISETRON TECH SHANGHAI CO LTD
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