High-purity tungsten hexacarbonyl for solid source delivery
一种六羰基钨、来源的技术,应用在固体来源材料领域,能够解决腐蚀微电子器件、激发替代钨来源试剂寻求、影响来源材料的性能及工艺可重复性等问题
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[0055] Tungsten hexacarbonyl vaporization tests were performed to evaluate solid source materials for tungsten hexacarbonyl.
[0056] A thermopile infrared (TPIR) detector was used to monitor vapors generated during operation of a vaporizer ampoule containing tungsten hexacarbonyl material. The TPIR detector utilizes a 1-meter linear unit configured with a reference channel, a channel for "free" carbon monoxide (CO), a channel for carbon dioxide (CO 2 ), and a channel configured for CO coordinated to the metal center at 5.0 microns to be able to detect W(CO) in the 5.0 micron filtered channel 6 and Mo(CO) 6 both.
[0057] The first vaporizer vessel (designated NSI Ampoule #1) was operated with granular tungsten hexacarbonyl material having the particle size distribution shown in Table 1 below.
[0058] Table 1
[0059] Granularity (mm)
Test 1(g)
Test 1(%)
Test 2(g)
average (g)
average(%)
>1.4
20.18
19.05
20.25
20.22
19.59 ...
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