Radio frequency MEMS switch having elastic beam contacts

Abstract

The invention relates to a radio frequency MEMS switch having elastic beam contacts. The radio frequency MEMS switch mainly comprises a substrate, a microwave transmission wire, a driving electrode, a lower electrode, a fixing anchor point, an upper electrode, a release hole, an air bridge and a leading wire, wherein the microwave transmission wire, the driving electrode and the leading wire are arranged on the substrate, the driving electrode is arranged below the upper electrode, the upper electrode is a straight plate-shaped structure, the upper electrode is fixed on the microwave transmission wire through the fixing anchor point, the lower electrode employs a double-contact structure having double elastic beams, the elastic beams are fixed on the microwave transmission wire through the fixing anchor point, and the double elastic beams are provided with the contacts respectively. From the aspect of mechanical performance, the impact effect of the upper electrode rapidly pulled down under the electrostatic action on the lower electrode can be reduced, the buffer effect is realized, the contacts and the upper electrode are protected, from the aspect of electrical performance, effective contact can be enhanced, switch burning and adhesion caused by weak contact can be avoided, a reliability problem caused by virtual connection of traditional double contacts can be effectively solved, and service life of the switch is improved to a large degree.

Description

technical field [0001] The invention belongs to the technical field of radio frequency MEMS, and in particular relates to a radio frequency MEMS switch with elastic beam contacts. Background technique [0002] As a passive device, RF MEMS switch is one of the basic components of the RF system. It transmits or isolates microwave signals through the capacitance formed by metal-metal contact or metal-insulating medium-metal. It has low insertion loss and high isolation. Excellent microwave performance, it can be widely used in various radio frequency, microwave and millimeter wave communication systems, and is of great significance to military fields such as radar early warning, tactical and strategic reconnaissance, satellite networking and guidance. [0003] At present, the domestic research institutes of RF MEMS switches mainly include the 13th Institute of China Power Group, the 55th Institute of China Power Group, Tsinghua University, Southeast University and other units. ...

AI Technical Summary

Problems solved by technology

For example, Tsinghua University discloses a micro-electromechanical system switch. The upper electrode adopts a multi-channel strip plate structure, and the lower electrode adopts a multi-contact structure. Due to the limited precision of the manufacturing process of the multi-contact, the flatness of the multi-contact cannot be guaranteed completely. Consistent, resulting in multiple contacts can not be connected at the same time, reducing the life of the switch

Similarly, CLP 55 has disclosed a radio frequency MEMS switch (patent No. CN102097222A) containing a shark-tooth contact system. Its shark-tooth contact system includes two sets of high and low contacts, each set of Contacts with a consistent height, but it is difficult to achieve the same height during production, so that there will be a virtual connection in the two contacts of the same group, which reduces the life of the switch

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