A kind of laser stripping device and method

A technology of laser stripping and laser beam, which is applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problems of high process adaptability, non-reusable glass substrate, large volume, etc., and achieve the effect of convenient use

Active Publication Date: 2019-08-23
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The above-mentioned display screen preparation can be realized in two ways: one is to peel off the whole large panel first and then cut the flexible screen into small screens (abbreviated as peeling first and then cutting). The advantage of this method is that the yield is high and the substrate can be reused. The disadvantages are low yield rate, high cost of a single device, large volume, and high cost of front and rear processes; the second is to first cut the large panel into small screens and then peel off each small screen (referred to as cutting first and then peeling). The advantages of this method It is high yield rate, low cost of single equipment, high process adaptability, but the disadvantage is low yield, and the glass substrate cannot be reused after being cut.

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  • A kind of laser stripping device and method
  • A kind of laser stripping device and method
  • A kind of laser stripping device and method

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Embodiment Construction

[0049] figure 1A specific embodiment of the laser lift-off device of the present invention is shown, the system includes a laser 1, a shutter 2, a uniform light shaping system 3, a mirror 4, a mask blocking device 5 and a working conveyor belt 6 arranged in sequence along the optical path direction .

[0050] Among them, the laser 1 is used to emit a laser beam B, that is, to provide a light source. The shutter 2 can be opened and closed quickly, and is used to block / release the laser beam emitted by the laser 1 . In practical applications, other forms of light source systems can also be used to replace the laser, and this light source system can have its own shutter, without the need for an additional shutter 2 . When the shutter 2 is in an open state, the laser beam emitted by the laser 1 passes through the shutter and shoots out. When the shutter 2 is in the closed state, the laser beam emitted by the laser 1 is blocked by the shutter and cannot be emitted outward. The ...

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Abstract

The invention discloses a laser peeling device and method, wherein the laser peeling device includes: a working conveyor belt for driving the display screen to be peeled to move on it, and the display screen to be peeled includes a glass substrate and a flexible display screen; The mask shielding device of the area and the light-shielding area, wherein the light-transmitting area is used to transmit a part of the laser beam and make it irradiate on the display screen to be peeled driven by the operation conveyor belt, so as to perform laser peeling on the display screen to be peeled off, In this way, a flexible display screen and a glass substrate separated from each other are obtained; and the light-shielding area is used to block the remaining part of the laser beam, so as to prevent the laser from irradiating areas other than the display screen to be peeled off on the operation conveyor belt. The laser stripping device and method of the present invention are compatible with large screens and small screens.

Description

technical field [0001] The invention relates to the technical field of laser lift-off in the process of flexible display panels, in particular a laser lift-off device and method compatible with large screens (peel first and then cut) and small screens (cut first and then peel off). Background technique [0002] With the development of the information society, people's demand for display devices is increasing day by day. Flexible display panels are more and more popular due to their thinness, bendability or even curling, and good mechanical properties. At present, flexible display panels are more and more widely used in daily life. Flexible display panels include flexible liquid crystal display (LCD) panels and flexible organic light emitting diode display (OLED) panels. Since the flexible OLED panel also has the advantages of OLED itself, such as self-luminescence, energy saving and environmental protection, lightness, flexibility, durability (impact resistance and not eas...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56
CPCH10K71/00
Inventor 张俊覃宗伟李志丹
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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