The present invention relates to a graphical epitaxial structure
laser lift-off device. The device comprises a substrate, a shaping structure, a transmissivity regulation structure, a graphical epitaxial structure,
gas transmission systems, an
ultraviolet source, a lift-off chamber and a light-in window. Two sides of the lift-off chamber are respectively provided with the
gas transmission systems,the light-in window is arranged on the lift-off chamber, the
ultraviolet source is arranged above the outer side of the light-in window, the graphical epitaxial structure is arranged in the light-inwindow, the graphical epitaxial structure is provided with the substrate, the graphical epitaxial structure comprises an epitaxial structure, a
sapphire substrate, graphical structures, inclined interfaces, planar interfaces, the plurality of graphical structures are uniformly arranged on the epitaxial structure, each graphical structure is one V-shaped slot structure formed by two inclined interfaces, and each planar interface is connected between each two adjacent graphical structures. The graphical epitaxial structure
laser lift-off device is ingenious in design and convenient to operate, can achieve lift-off of the graphical substrate and can improve the lift-off yield.