This invention relates to the field of
nitride-based optoelectronic device fabrication technology, and particularly to a flexible
nitride-based vertical structure optoelectronic device array and its fabrication method. The array comprises, from bottom to top, a flexible substrate, a p-
electrode thin film, a p-side aperture
isolation layer, a light-emitting
functional composite layer, an n-side aperture
isolation layer, and discrete n-electrodes, all stacked tightly together. In the light-emitting
functional composite layer, single-
crystal light-emitting
diode (LED) chips are arranged at intervals and tightly surrounded by a
nitride polycrystalline epitaxial region. The p-side aperture
isolation layer is bonded to the lower surface of the nitride polycrystalline epitaxial region, and the n-side aperture isolation layer is bonded to the upper surface. Both the nitride polycrystalline epitaxial region and the single-
crystal LED chips have, from bottom to top, an n-type doped AlGaN layer, a multi-period AlGaN
quantum well, a p-type doped AlGaN layer, and a p-type GaN
contact layer. The advantages are: the fabricated device provides a
stress relief channel for bending, the single-
crystal LED chips are independently controlled for light, and there is no
thermal damage during peeling.