Trough body of hole enlarging trough for cutting silicon slice by diamond line

[0027] Below in conjunction with specific embodiment, content of the present invention is described in further detail:

[0028] like Figure 1-5 As shown, a groove body of a reaming groove for diamond wire cutting silicon wafers is characterized in that: it includes an inner groove body 2 and an outer groove body 1 nested inside and outside, and is connected with the outer groove body 1 and extends to the inner groove body 2 The liquid guiding device at the upper end, the liquid inlet device fixed on the inner tank body 2 and the cooling device arranged at the lower end of the outer tank body 1.

[0029] Among them, a cylinder 5 is respectively fixed on a pair of parallel outer side walls of the outer tank body 1; a bank platform 6 supported on the upper end of the cylinder 5 is respectively extended outward from the side walls at the upper end of the inner tank body 2, and a liquid outlet is provided at the lower end of the side wall at one end. A baffle plate 4 with both ends fixed on the inner wall of the outer tank body 1 is attached to the mouth 3 and the liquid outlet 3, and the liquid outlet 3 is arranged along the short axis of the inner tank body 2 and has a long strip structure.

[0030] The liquid guide device includes a catheter 7 and a valve 8 arranged on the catheter 7. The lower end of the catheter 7 is connected to the lower end of the side wall of the outer tank body 1, and the upper end is arranged on the upper end of the inner tank body 2 along the horizontal direction, and deviates from the inner tank body 2. The side wall of the tank body 2 is arranged, and a plurality of connecting hoses 9 are evenly distributed along the central axis direction on the lower end surface of the horizontal catheter tube 7 .

[0031] The liquid inlet device is fixed on the upper end of the inner wall of the inner tank body 2 near the side of the connecting hose 9, including a liquid accumulation box 10 and several spiral guide vanes 12 arranged at the lower end of the liquid accumulation box 10; The end of the tube 9 is fixedly connected and communicated with the connecting hose 9. There are several liquid guide holes on the lower end surface; Fixed connection.

[0032] The cooling device includes a refrigerator 13 and a cooling water pipe 14 connected to the refrigerator 13. The cooling water pipe 14 is arranged at the lower end of the inner side of the outer tank body 1, and is arranged sequentially in an S-shape with an integrated structure along the horizontal direction, and two layers are arranged in total. It passes through the outer tank body 1 and is connected with the refrigerator 13 .

[0033] As a further optimization of this embodiment, the inside of the bank platform 6 has a guide groove 15 arranged in an arc shape, and the lower end of the guide groove 15 has a cavity 16 communicating with the guide groove 15, and the inner wall of the cavity 16 is arc-shaped; The upper end of the cylinder 5 is connected with a fixed block 17 and is connected with the fixed block 17 and is nested in the slide bar 18 arranged in the guide groove 15; the upper end surface of the fixed block 17 is arc-shaped, and is in the cavity 16. The inner diameter is larger than the outer diameter of the fixing block 17 .

[0034] When working, the lower end surface of the inner tank body 2 is horizontal, and the liquid outlet 3 is closely attached to the baffle plate 4, and the liquid medicine is inside the inner tank body 2 for processing and reacting on the surface of the silicon wafer. After a period of time, The heat released by the silicon chip increases the temperature of the liquid medicine. At this time, a pair of cylinders 5 work at the same time to move the inner tank body 2 upward. At this time, the liquid outlet 3 and the baffle plate 4 are staggered, and the liquid medicine flows out from the liquid outlet 3. Then one side of the cylinder 5 stops moving, and the other side of the cylinder 5 continues to move upwards for a short distance, so that the inner tank body 2 is arranged in an inclined shape, which is more convenient for the flow of the liquid medicine; The effect realizes effective cooling, and flows into the effusion box 10 through the catheter tube 7 again, and finally flows into the inner tank body 2 through the action of the fluid guide hole and the spiral deflector 12. The spiral deflector 12 can further improve the The mixing uniformity of the liquid; after one end of the cycle, the cylinder 5 on the higher side moves downward, and when it moves to the level of the inner tank 2, the cylinders 5 on both sides move downward at the same time, so that the baffle 4 is at the liquid outlet 3, and then the catheter 7 continues to discharge the liquid medicine into the inner tank body 2. At this time, the liquid medicine has achieved sufficient cooling and uniformity, which is convenient for the processing of silicon wafers, and the finishing structure design is very reasonable.

[0035] The above-mentioned embodiments are only to illustrate the technical conception and characteristics of the present invention. Substantial equivalent changes or modifications shall fall within the protection scope of the present invention.