Film thickness monitor and evaporation machine

Abstract

The invention provides a film thickness monitor and a thermal evaporator. The film thickness monitor comprises a housing, a rotating disk disposed in the housing, a plurality of film thickness monitoring sensors which are disposed in the housing and are fixed to the rotating disk, a window disposed in the housing, and a fan disposed in the window. The rotating disk rotates, driving the plurality of film thickness monitoring sensors to pass the window in order. With the installation of the fan in the window of the housing, the organic micromolecule material volatilized to the window during theprocess of evaporation will be reduced, and the film thickness deposited on the surface of the film thickness monitoring sensor can be decreased, the service lifetime of the film thickness monitoringsensor will be prolonged, and the opening times of the cavity body of the thermal evaporator will be reduced, and the operation ratio and production power of the thermal evaporator will be improved. The thermal evaporator is advantageous in that with the installation of the film thickness monitor, the opening times of the cavity body of the thermal evaporator will be reduced, and the operation ratio and production power of the thermal evaporator will be improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a film thickness monitor and an evaporation machine. Background technique [0002] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display, also known as organic electroluminescent display, is a new type of flat panel display device, due to its simple preparation process, low cost, low power consumption, high luminance, Wide range of working temperature, light and thin size, fast response speed, easy to realize color display and large-screen display, easy to realize matching with integrated circuit driver, easy to realize flexible display, etc., so it has broad application prospects. [0003] According to the driving method, OLED can be divided into two categories: passive matrix OLED (Passive Matrix OLED, PMOLED) and active matrix OLED (Active Matrix OLED, AMOLED), namely direct addressing and thin film transistor (TFT, Thin Film Transistor) There are two typ...

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Problems solved by technology

[0007] Once the film thickness on the surface of the film thickness monitoring sensor at the window reaches a certain level, the film thickness monitoring sensor has reached its service life and cannot continue to work. Therefore, it is necessary to turn the turntable to move other film thickness monitoring sensors to the window to continue work, when all the film thickness monitoring sensors on the turntable have reached the end of their service life, it is necessary to open the cavity of the OLED evaporation machine and replace all the film thickness monitoring sensors in the film thickness monitor. , the high frequency of use of the OLED evaporation machine makes the service life of the film thickness monitoring sensor short, so it is necessary to frequently open the cavity of the OLED evaporation machine, thereby reducing the utilization rate and production capacity of the OLED evaporation machine, thereby reducing OLED production efficiency

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